150V-BCD (Binary-Coded Decimal) bulk silicon manufacturing technology and LCD (Liquid Crystal Display) backlight drive chip

Abstract

The invention discloses a 150V-BCD (Binary-Coded Decimal) bulk silicon manufacturing technology and an LCD (Liquid Crystal Display) backlight drive chip. The 150V-BCD bulk silicon manufacturing technology comprises the following steps of: preparing a high-resistance substrate silicon sheet; adding an N-shaped buried layer on a substrate; connecting the N-shaped buried layer by using an NSINKER1 drain structure; extending an N-shaped extension layer; forming an opposite-pass structure with NSINKER2; forming an LDPMOS device region, a Resurf voltage resisting region and a channel connecting region to form a horizontal structure LPMOS high- voltage device; forming a Resurf voltage resisting region, a compensation injection JFET region, a VDNMOS device region and a composite MOS (Metal-Oxide Semiconductor) gate channel; replacing the traditional PISO isolation structure by using a deep-groove isolation structure; using double thin gate oxide (DGO) as gate oxide of a low voltage device; using N+ / P+ as drain injection of all devices; reducing interconnection resistance by using a self-alignment silicide technology (Salicide); forming contact holes; forming device connection by using MET; and using press welding points by using PAD. The LCD backlight drive chip comprises a multilevel charge-pump voltage booster circuit, an EL oscillating circuit, a VSENSE module, a high-voltage conversion module and a full-bridge type drive structure.

Description

technical field [0001] The invention relates to a 150V-BCD bulk silicon manufacturing process and an LCD backlight drive chip, and belongs to the technical field of 150V-BCD process development and LCD high-voltage power chips. Background technique [0002] With the rapid development of semiconductor microelectronics technology and liquid crystal display technology in recent decades, the application of portable LCD electronic products has been recognized by consumers and widely used. The field EL light source that provides backlight display for LCD is currently the mainstream display technology due to its advantages of compact size, uniform light output, and low power consumption. Although advanced LED backlight technology has been recognized by the industry as the next generation of new backlight display technology, factors such as high cost of LED and immature technology limit its application at this stage. [0003] At present, the field-induced light source EL with capac...

AI Technical Summary

Problems solved by technology

Although advanced LED backlight technology has been recognized by the industry as the next generation of new backlight display technology, factors such as high LED cost and immature technology limit its application at this stage.

[0003] At present, the field-induced light source EL with capacitive load characteristics is mostly driven by the SOI high-voltage process technology with good electrical isolation and high cost.

In order to meet consumers' desire for rich colors, vivid and high-quality display effects, the number of channels of the high-voltage driver chip needs to be increased to more than 8, which will greatly increase the cost and expenditure, which limits the application of LCD high-voltage driver technology

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