Edge terminal structure of high-voltage power semiconductor device

A technology of power semiconductors and edge terminals, applied in the direction of semiconductor devices, electric solid devices, electrical components, etc., can solve the problems of increasing chip cost and increasing chip area, so as to reduce chip cost, reduce electric field strength, and save chip area Effect

Inactive Publication Date: 2011-02-09
ZHEJIANG UNIV +1
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

Generally speaking, the withstand voltage will increase with the increase of the number of field limiting rings. However, the increase in the number of field limiting rings will also increase the occupied chip area, which will increase the cost of the chip.

Method used

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  • Edge terminal structure of high-voltage power semiconductor device
  • Edge terminal structure of high-voltage power semiconductor device
  • Edge terminal structure of high-voltage power semiconductor device

Examples

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Embodiment Construction

[0016] figure 2 A kind of embodiment of the present invention is provided, as shown in the figure, in arsenic ion (As) concentration is 5*10 22 cm -3 An epitaxial layer 2 of the same conductivity type is epitaxially grown on an N-type silicon substrate 1 (thickness 20 μm). The epitaxial layer 2 has a resistivity of 5Ω*cm and a thickness of 17 μm. A high-voltage power device 12 is provided on the upper surface of the epitaxial layer 2. The device can be VDMOS, LDMOS, BJT, etc. The device is composed of several cells connected in parallel. In the figure, only the edge area of ​​the edge cells is shown as its schematic diagram . An electrode 10 and a field plate 8 are provided on the device 12, which are active regions 11 for realizing core functions of the chip. In addition, an electrode 9 is also provided on the bottom of the substrate 1 as an external electrode of the test chip.

[0017] A P-type doped region 5a is provided on the outside of the device 12 relative to the ...

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Abstract

The invention discloses an edge terminal structure of a high-voltage power semiconductor device. The edge terminal structure comprises a plurality of field limiting rings which surround the power semiconductor device and have the conduction type opposite to that of a substrate, wherein doping regions which have the same conduction type as the field limiting rings and lower doping density than the field limiting rings are arranged around the field limiting rings; the field limiting rings are wrapped by the doping regions and coated by field plates; and the field limiting rings are separated from the field plates by using silicon dioxide layers. The field plates can be made of copper, aluminum, polycrystalline silicon, oxygen-doped polycrystalline silicon and the like. Because the doping regions with lower density are arranged around the conventional field limiting rings, the density of edge cell electric field lines can be effectively reduced, the electric field strength born by an edge cell is reduced, the breakdown voltage is increased, the area efficiency of the edge terminal structure is effectively improved, the chip area is saved and the chip cost is reduced.

Description

technical field [0001] The invention relates to the technical field of semiconductor devices, in particular to an edge terminal structure of a high-voltage power semiconductor device. Background technique [0002] Power semiconductor devices, such as vertical double diffused field effect transistor (VDMOS), insulated gate bipolar transistor (IGBT), etc., are often composed of several cells connected in parallel in order to obtain a certain current capability. Since cell-to-cell depletion is formed among each other, breakdown is not easy to occur. However, the edge cell (also known as the transition region or the main junction) has dense electric field lines due to the small curvature radius of the depletion layer edge, and its electric field strength is much higher than that in the body, so the breakdown voltage will be much lower than in the body, and the breakdown first Occurs on the surface of edge cells. Therefore, a special structure should be adopted to protect the e...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): H01L27/02H01L29/06
Inventor 胡佳贤韩雁揭英亮陈素鹏张世峰张斌
Owner ZHEJIANG UNIV
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