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High-hardness and high-elastic modulus CrAlN/AlON nano multilayer coating material and preparation method thereof

A coating material, nano-multi-layer technology, applied in coating, metal material coating process, ion implantation plating, etc., can solve the problems of hardness, oxidation resistance temperature and deposition efficiency, hardness and elastic modulus are not high enough , poor high temperature oxidation resistance, etc., to achieve excellent high temperature oxidation resistance, high hardness, and low equipment requirements

Active Publication Date: 2011-04-13
宁波盾戈涂层技术有限公司
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0013] The above-mentioned existing coating materials all have the problems that hardness, oxidation resistance temperature and deposition efficiency cannot be balanced, and have disadvantages such as insufficient hardness and elastic modulus, poor high temperature oxidation resistance, low production efficiency, and large energy consumption.

Method used

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  • High-hardness and high-elastic modulus CrAlN/AlON nano multilayer coating material and preparation method thereof
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  • High-hardness and high-elastic modulus CrAlN/AlON nano multilayer coating material and preparation method thereof

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Experimental program
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Embodiment 1

[0044] Ar gas partial pressure is 0.1Pa, N 2 The gas partial pressure is 0.1Pa; the CrAlN sputtering power is 118.8W, and the time is 15s; the AlON sputtering power is 120W, and the time is 1s; the substrate temperature is 300°C.

[0045] After testing, the thickness of the obtained CrAlN layer is 5nm, the thickness of the AlON layer is 0.3nm, the total thickness is 1.9μm, the hardness is 31.1GPa, and the elastic modulus is 352.5GPa; X-ray phase analysis shows that the AlON layer is a face-centered cubic structure, and the preferred orientation is (200) and (111), growing in the form of columnar crystals (see figure 2 ).

Embodiment 2

[0047] Ar gas partial pressure is 0.1Pa, N 2 The gas partial pressure is 0.1Pa; the sputtering power of CrAlN is 116.8W, and the time is 15s; the sputtering power of AlON is 120W, and the time is 2s; the substrate temperature is 300°C.

[0048] After testing, the thickness of the obtained CrAlN layer is 5nm, the thickness of the AlON layer is 0.6nm, the total thickness is 2.0μm, the hardness is 33.3GPa, and the elastic modulus is 362.4GPa; X-ray phase analysis shows that the AlON layer is a face-centered cubic structure, and the preferred orientation is (200) and (111), growing in the form of columnar crystals.

Embodiment 3

[0050] Ar gas partial pressure is 0.1Pa, N 2 The gas partial pressure is 0.1Pa; CrAlN sputtering power is 117.2W, time is 15s; AlON sputtering power is 80W, time is 3s; substrate temperature is 300℃.

[0051] After testing, the thickness of the obtained CrAlN layer is 5nm, the thickness of the AlON layer is 0.9nm, the total thickness is 2.2μm, the hardness is 32.2GPa, and the elastic modulus is 365.6GPa; X-ray phase analysis shows that the AlON layer is a face-centered cubic structure with a preferred orientation For (200) and (111), it grows in the form of columnar crystals.

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Abstract

The invention discloses a high-hardness and high-elastic modulus CrAlN / AlON nano multilayer coating material which is composed of a plurality of CrAlN layers and AlON layers, wherein the CrAlN layers and the AlON layers are alternately deposited on a substrate to form a nano-level multilayer structure, the total thickness of the multilayer structure is 1.9-2.5 mu m, the thickness of each CrAlN layer is 5 nm, and the thickness of each AlON layer is 0.3-1.8 nm. The invention also discloses a preparation method of the nano multilayer coating material, which comprises the following steps: polishing the surface of the substrate; and carrying out ultrasonic cleaning and ion cleaning, and alternately sputtering the CrAlN layers and the AlON layers on the substrate by a reactive sputtering method. The multilayer coating material has the hardness above 30 GPa and the elastic modulus above 300 GPa, has the characteristics of high high-temperature oxidation resistance and good corrosion resistance and can be used as the protective coating of a high-speed cutting tool and other wear resistant workpieces under high-temperature working conditions. The preparation method has the advantages of simple process, high deposition speed, low cost, high bonding strength and the like.

Description

Technical field: [0001] The invention relates to a coating material, in particular to a CrAlN / AlON nanometer multi-layer coating material with high hardness and high elastic modulus and a preparation method thereof, belonging to the technical field of material surface modification engineering. Background technique: [0002] With the continuous development of metal cutting technology in the direction of high speed and high precision and the promotion of dry cutting technology, higher and higher requirements are put forward for the performance of cutting tool materials: that is, high hardness, high modulus of elasticity, low friction Coating coefficient and other excellent mechanical properties and good high temperature oxidation resistance, so coating materials with excellent performance on the substrate of cutting tools has become a commonly used method to improve the performance of cutting tools. [0003] The hardness of the commonly used TiN coating is about 23GPa, and its...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C23C14/06C23C14/34
Inventor 李伟刘平郑康培马凤仓刘新宽陈小红杨丽红
Owner 宁波盾戈涂层技术有限公司