Micro-longhole measuring method based on fiber grating

A fiber grating and measurement method technology, applied in the direction of measurement devices, optical devices, scanning probe microscopy, etc., can solve the problems of limiting ultra-deep hole measurement capabilities, weakening of spot image signals, and unstable force measurement. Achieve the effects of low loss, good spectral characteristics and good accuracy

Inactive Publication Date: 2011-04-20
TIANJIN UNIV
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Problems solved by technology

If the standard ring is used to calibrate, the accuracy of this measurement method will be higher, but there are still problems in this method: when measuring small holes, the bending deformation of the dry measuring rod will cause a large measurement error, and the force

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[0038] In order to make the object, technical solution and advantages of the present invention clearer, the implementation manner of the present invention will be further described in detail below in conjunction with the accompanying drawings.

[0039] In order to solve the above problems, improve the precision and accuracy of measurement, and expand the scope of application, the embodiment of the present invention provides a method for measuring micro-deep holes based on fiber gratings, see figure 1 , figure 2 and image 3 , see the description below:

[0040] 101: the light source 1 emits a light beam, and the light beam enters the circulator 2 through the first port of the circulator 2;

[0041] see Figure 4 , the circulator 2 belongs to the three-port optical passive device, there are two transmission paths of the light beam, namely from the first port to the second port and from the second port to the third port, the first port and the third port are input ports resp...

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Abstract

The invention discloses a micro-longhole measuring method based on a fiber grating, relating to the field of size measurement into a micro inner cavity. The method mainly reflects the contact condition between a wall-touch spherule and the inner wall of a millipore to be measured through the drift value of the central wavelength of a fiber grating reflectance spectrum and realizes the three-dimensional aperture measurement of the millipore to be measured by the aid of a control circuit and a three-coordinate measuring engine. The micro-longhole measuring method based on the fiber grating, which is provided by the invention, has the advantages of low loss, good spectrum characteristics, high accuracy and good repetitiveness without null drift, expands the measurement range, converts contact conditions in space into the change of an optical spectrum, overcomes the limitation caused by diffraction loss in measuring the millipore to be measured by using a traditional CCD (Charge-Coupled Device) spot displacement method, avoids the influence of the conditions, such as the power fluctuation of a light source, the microbending effect of fiber, the coupling loss, and the like, avoids causing loss to the micro hole and prolongs the service life of an optical probe.

Description

technical field [0001] The invention relates to the field of dimension measurement that can go deep into a tiny inner cavity, in particular to a method for measuring a micro deep hole based on an optical fiber grating. Background technique [0002] With the rapid development of machinery, aerospace industry and cutting-edge industry, there are more and more small-sized parts, how to realize the precise measurement of micro-holes and micro-deep holes has become the key to restricting the improvement of aerospace and automotive device performance indicators. Explore an actionable measurement method. [0003] At present, nanometer-level resolution has been achieved in the measurement of external dimensions, but the measurement level of internal dimensions is relatively backward. The development of precision micro-inner dimension measurement technology is limited by the existing technology level. Scholars at home and abroad have done a lot of research on this. The earliest ap...

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Application Information

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IPC IPC(8): G01B11/00G01B9/00C03B37/02G01Q70/16
Inventor 张瑞峰张忠娟吕辰刚李世忱
Owner TIANJIN UNIV
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