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Method for producing electronic grade hydrochloric acid

A production method and electronic-grade technology, applied in the direction of chlorine/hydrogen chloride purification, chlorine/hydrogen chloride, etc., can solve the problems of non-continuous large-scale production, low efficiency, low yield, cumbersome production operations, etc., and achieve continuous production and simple equipment , good stability

Active Publication Date: 2011-05-18
SHANGHAI ZHENGFAN TECH
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

The batch distillation method is still used by some manufacturers, but its efficiency and yield are relatively low, and the production operation is also relatively cumbersome, and it does not have the ability of continuous large-scale production

Method used

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  • Method for producing electronic grade hydrochloric acid
  • Method for producing electronic grade hydrochloric acid
  • Method for producing electronic grade hydrochloric acid

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Embodiment Construction

[0024] The present invention will be further described below in conjunction with the accompanying drawings and embodiments.

[0025] figure 1 It is a schematic diagram of the electronic grade hydrochloric acid production device of the present invention; figure 2 It is a flow chart of the electronic grade hydrochloric acid production method of the present invention.

[0026] See figure 1 and figure 2 , the electronic grade hydrochloric acid production method provided by the invention, comprises the following steps successively:

[0027] Step S1: National standard reagent grade 31% hydrochloric acid raw material, the hydrochloric acid raw material is stored in the plastic raw material tank 1;

[0028] Step S2: The above-mentioned hydrochloric acid raw material is filtered by a micron-sized PP material filter element and then enters the preheater 2 for preheating at a flow rate of 50-100kg / h, and then enters the reboiler 5. The preheater 2 is used to convert the normally di...

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PUM

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Abstract

The invention discloses a method for producing electronic grade hydrochloric acid, sequentially comprising the following steps of: (a) providing a 31% hydrochloric acid raw material with a national standard reagent grade; (b) carrying out microfiltration on the hydrochloric acid raw material, preheating in a preheater and putting into a reboiler; (c) heating the reboiler by utilizing saturated steam and obtaining an end product after hydrochloric acid steam generated through the heating passes through a condenser; (d) absorbing hydrochloric acid tail gas by utilizing running water; and (e) putting the end product obtained in the step (c) into an end product storage tank, carrying out ultrafiltration to remove grains and obtaining final hydrochloric acid which is applied to electronic industry. The method for producing the electronic grade hydrochloric acid, which is provided by the invention, is used for obtaining 37% electronic grade hydrochloric acid by adopting the method of carrying out direct and continuous distillation and purification on the 31% hydrochloric acid with the national standard reagent grade, has the characteristics of large ratio of yield to energy consumption,production continuity, simple process and equipment and good stability; furthermore, the concentration of the hydrochloric acid raw material has no specific requirement and the concentration of the end product can be adjusted at will.

Description

technical field [0001] The invention relates to a method for producing hydrochloric acid, in particular to a method for producing electronic-grade hydrochloric acid required for large-scale integrated circuits. Background technique [0002] Hydrochloric acid, with a relative molecular weight of 36.46, is a strong acid, a colorless transparent liquid, miscible with water. Concentrated hydrochloric acid is extremely volatile, fumes in the air, and has a pungent odor. At normal temperature (25 degrees), the mass fraction of hydrogen chloride in concentrated hydrochloric acid is about 37%, and the density is 1.18g / ml. Ultra-clean and high-purity hydrochloric acid is an acid cleaning agent and corrosive agent, which can be used in conjunction with hydrogen peroxide, and is mainly used in the production of large-scale integrated circuit technology. [0003] The preparation techniques of ultra-pure hydrochloric acid generally include: batch distillation, isothermal diffusion, and...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C01B7/07
Inventor 汤剑波李东升
Owner SHANGHAI ZHENGFAN TECH
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