High-quality gallium nitride light-emitting diode
A technology based on light-emitting diodes and gallium nitride, used in electrical components, circuits, semiconductor devices, etc.
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[0031] see figure 1 As shown, the present invention provides a gallium nitride-based light-emitting diode, which includes:
[0032] A substrate 11, from (0001) to sapphire (Al 2 o 3 ) is the substrate 11, and other materials that can be used for the substrate 11 also include aluminum oxide single crystals on the R-plane or A-plane, 6H-SiC, 4H-SiC, or single crystal oxides whose lattice constants are close to those of nitride semiconductors things. In the preparation of the substrate 11, high-purity NH3 is used as N source, and high-purity H 2 and N 2 mixed gas as carrier gas; trimethylgallium or triethylgallium as Ga source, trimethylindium as In source, trimethylaluminum as Al source; n-type dopant is silane, p-type dopant is Magnesium dichloride.
[0033] A gallium nitride nucleation layer 12 , the gallium nitride nucleation layer 12 is fabricated on the substrate 11 . The growth parameters of the gallium nitride nucleation layer 12 include: reaction temperature 500°C...
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