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High-quality gallium nitride light-emitting diode

A technology based on light-emitting diodes and gallium nitride, used in electrical components, circuits, semiconductor devices, etc.

Inactive Publication Date: 2011-05-18
INST OF SEMICONDUCTORS - CHINESE ACAD OF SCI
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

Although many patents mention the use of intercalated layers to improve stress distribution, they are all high-temperature intercalated layers.

Method used

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  • High-quality gallium nitride light-emitting diode
  • High-quality gallium nitride light-emitting diode
  • High-quality gallium nitride light-emitting diode

Examples

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Embodiment Construction

[0031] see figure 1 As shown, the present invention provides a gallium nitride-based light-emitting diode, which includes:

[0032] A substrate 11, from (0001) to sapphire (Al 2 o 3 ) is the substrate 11, and other materials that can be used for the substrate 11 also include aluminum oxide single crystals on the R-plane or A-plane, 6H-SiC, 4H-SiC, or single crystal oxides whose lattice constants are close to those of nitride semiconductors things. In the preparation of the substrate 11, high-purity NH3 is used as N source, and high-purity H 2 and N 2 mixed gas as carrier gas; trimethylgallium or triethylgallium as Ga source, trimethylindium as In source, trimethylaluminum as Al source; n-type dopant is silane, p-type dopant is Magnesium dichloride.

[0033] A gallium nitride nucleation layer 12 , the gallium nitride nucleation layer 12 is fabricated on the substrate 11 . The growth parameters of the gallium nitride nucleation layer 12 include: reaction temperature 500°C...

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Abstract

The invention provides a gallium nitride light-emitting diode which comprises a substrate, a gallium nitride nucleating layer, a buffer layer, an n type contact layer, an n type insertion layer, an activated light-emitting layer, a p type electronic barrier layer, a p type contact layer, a cathode and an anode, wherein the gallium nitride nucleating layer is made on the substrate; the buffer layer is made on the gallium nitride nucleating layer; the n type contact layer is made on the buffer layer, one side of the upper surface of the n type contact layer has an etched platform surface; the n type insertion layer is made inside one side of the n type contact layer, which is far away from the platform surface, and the n type contact layer is arranged on the n type insertion layer; the activated light-emitting layer is made on the n type contact layer, which is far away from the platform surface, and covers part of surface of the n type contact layer; the p type electronic barrier layer is made on the activated light-emitting layer; the p type contact layer is made on the p type electronic barrier layer and consists of p type gallium nitride; the cathode is made on the platform surface of the n type contact layer; and the anode is made on the p type contact layer, thus the gallium nitride series light-emitting diode is made.

Description

technical field [0001] The invention relates to a gallium nitride (GaN)-based light-emitting diode, in particular to a gallium-nitride-based light-emitting diode with a low-temperature n-type insertion layer. Background technique [0002] At present, III-V semiconductor optoelectronic materials are known as the third generation semiconductor materials. GaN-based light-emitting diodes have become the focus of industry research because they can produce light-emitting diodes (referred to as "LEDs") of various colors (especially blue or violet light that requires a high energy gap) by controlling the composition of materials. [0003] The epitaxial growth of GaN-based semiconductor materials or devices currently mainly adopts MOCVD technology. In the process of growing nitride semiconductors (GaN, AlN, InN and their alloy nitrides) using MOCVD technology, sapphire is usually used as the substrate for heteroepitaxy because there is no substrate material that matches the GaN latt...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): H01L33/12H01L33/00
Inventor 马平王军喜王国宏曾一平李晋闽
Owner INST OF SEMICONDUCTORS - CHINESE ACAD OF SCI
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