Gallium-arsenide-based multi-junction isotope micro cells

A gallium arsenide-based, isotope technology, applied in the field of gallium arsenide-based multi-junction isotope microbatteries, can solve the problems of insufficiency, thick PN junction, immature growth process, etc. Effective collection thickness effect

Inactive Publication Date: 2011-06-15
BEIJING INSTITUTE OF TECHNOLOGYGY
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Problems solved by technology

However, the PN junction formed by the conventional semiconductor material Si itself is already very thick, which is not suitable for multi-junction isotope micro-

Method used

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  • Gallium-arsenide-based multi-junction isotope micro cells
  • Gallium-arsenide-based multi-junction isotope micro cells

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Embodiment

[0022] A gallium arsenide-based multi-junction isotope micro-battery of the present invention, such as figure 1 As shown, it includes three single-junction GaAs-based isotope microcells, and every two single-junction GaAs-based isotope microcells are connected by a tunnel junction. The depletion region and surface of GaAs-based multi-junction isotope microcells Using SiO 2 Passivation; the specific processing steps are as follows:

[0023] 1) Load the clean GaAs substrate into the molecular beam epitaxy sample chamber, bake at 200°C for 4 hours, and then send it to the buffer chamber for growth;

[0024] 2) Before the growth, the GaAs substrate is heated to 600°C to remove the surface oxide layer (the removal of the oxide layer can be judged by the high-energy electron diffraction pattern);

[0025] 3) Using MBE (molecular beam epitaxy) technology to sequentially grow single-junction gallium arsenide-based isotope microcells 5, tunnel junction 4, single-junction gallium arse...

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Abstract

The invention relates to gallium-arsenide-based multi-junction isotope micro cells, belonging to the field of energy sources in a micro electromechanical system. The invention comprises two or more single-junction gallium-arsenide-based isotope micro cells, wherein two single-junction gallium-arsenide-based isotope micro cells are connected through a tunnel joint; the surfaces of the multi-junction isotope micro cells are passivated by using SiO2, and the structure expression is the single-junction gallium-arsenide-based isotope micro cell/the tunnel joint/the single-junction gallium-arsenide-based isotope micro cell/the tunnel joint/....../the single-junction gallium-arsenide-based isotope micro cell/the substrate. By using the multilayered PN joint structure, the open-circuit voltage ofthe isotope micro cell is improved to make up the defect of capability of collecting electric charge by the cell so as to improve the energy conversion efficiency of the isotope micro cell, and extend the selection range of energy, so that the output power of the cell is greatly improved and the application field is wider.

Description

technical field [0001] The invention is a gallium arsenide-based multi-junction isotope micro-battery, which belongs to the field of energy in micro-electromechanical systems. Background technique [0002] In recent years, people's research on micro-electromechanical systems is extremely active. Micro-energy is a bottleneck problem in the development of micro-systems. Research on high-efficiency and long-life micro-energy is the goal that has been pursued in the development of micro-systems. Countries all over the world have successively carried out research work on micro-energy sources and produced many micro-energy sources. Such as micro fuel cells, micro internal combustion engine systems, micro solar cells, micro isotope micro batteries, etc. The isotope micro-energy micro-battery shows its unique advantages, such as small size (micron level), long life (up to ten or even decades), good stability, and high energy density. a new direction. [0003] The upper limit of ...

Claims

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Application Information

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IPC IPC(8): G21H1/06
Inventor 姜澜陈海洋李大让尹建华蔡胜国
Owner BEIJING INSTITUTE OF TECHNOLOGYGY
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