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Parabolic two-dimensional focusing X-ray compound refractive lens

A technology combining refractive lenses and paraboloids, applied in the application of diffraction/refraction/reflection for processing, etc., can solve the problems of insufficient manufacturing process accuracy, complex system design and adjustment, and large limitations on lens materials, and achieves the solution to the optical axis. Effects of calibration, small material constraints, improved focus and imaging quality

Active Publication Date: 2011-08-17
HUAWEI TEHCHNOLOGIES CO LTD
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Problems solved by technology

[0005] In order to overcome the shortcomings of the existing two-dimensional focusing X-ray combined refracting lens that the optical axis alignment is extremely difficult, the focusing efficiency is not high enough, the manufacturing process precision is not high enough, the mold processing is difficult, the lens material is limited, and the system design and assembly are very complicated. The invention provides a parabolic two-dimensional focusing X-ray combined refracting lens with high-precision self-calibration of the optical axis, high focusing efficiency, high manufacturing process precision, small lens material restrictions, and easy system design, assembly and debugging.

Method used

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  • Parabolic two-dimensional focusing X-ray compound refractive lens
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  • Parabolic two-dimensional focusing X-ray compound refractive lens

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Embodiment 2

[0039] refer to Figure 1a ~ Figure 2d , in this embodiment, the thickness of the glass substrate is 2 millimeters, and the thickness of the clamping arm is 100 microns.

[0040] The long axis of the first parabolic cavity on the master mirror body is 242 microns, the short axis is 222 microns, and the center line of the first parabolic cavity is along the Figure 2a The y-axis direction of the coordinate system shown; the first parabolic cavity and the square cavity on the mother mirror are arranged in sequence according to the order of a first parabolic cavity followed by a square cavity, and the first parabolic cavity The shape cavity and the square cavity are coaxial along the z-axis of the coordinate system, and there are 100 square cavities; the length and width of the square cavity are 252 microns, and the height is 250 microns. The y-axis direction of the system; Figure 2a In the xoz section of the coordinate system shown, the distance between the center of the firs...

Embodiment 3

[0046] refer to Figure 1a ~ Figure 2d , in this embodiment, the thickness of the glass substrate is 1.8 mm, and the thickness of the clamping arm is 80 microns.

[0047] The long axis of the first parabolic cavity on the main body of the mother mirror is 200 microns, and the short axis is 180 microns, and the center line of the first parabolic cavity is along the Figure 2a The y-axis direction of the coordinate system shown; the first parabolic cavity and the square cavity on the mother mirror are arranged in sequence according to the order of a first parabolic cavity followed by a square cavity, and the first parabolic cavity Shaped cavities and square cavities are coaxial along the z-axis of the coordinate system, and there are 60 square cavities; the length and width of the square cavities are 211.5 microns, and the height is 210 microns. The y-axis direction of the system; Figure 2a In the xoz section of the coordinate system shown, the distance between the center of ...

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Abstract

The invention discloses a parabolic two-dimensional focal X-ray compound refractive lens, which comprises a glass substrate and a mother mirror; the mother mirror comprises a mother mirror main body, a first parabolic cavity and square cavities which are orderly arranged on the mother mirror main body at intervals,and formed by connecting cross sections thereof, wherein the cross sections are twosymmetric parabolic openings; the first parabolic cavity is provided with a first paraboloid, each square cavity is embedded with a sub-mirror body with a cross section in square, a second parabolic cavity formed by connecting two symmetrical parabolic openings is arranged in the middle of the sub-mirror body, the second parabolic cavity is provided with a paraboloid, and the first paraboloid andthe second paraboloid are in mutual orthogonal structure. An optical axis is capable of performing self-calibration in high precision, the focusing efficiency is high, the precision of fabrication process is high, the limitation to the lens material is smaller, and the system design and assembling are simple.

Description

technical field [0001] The invention relates to an X-ray microstructure optical device, which is suitable for two-dimensional focusing and imaging of high-energy X-ray band (>5keV) radiation. Background technique [0002] X-ray composite lens is an X-ray microstructure optical device based on refraction effect proposed by A. Snigirev in 1996, which is suitable for high-energy X-ray band (that is, X-ray radiation energy exceeds 5keV). It has the advantages of no need to bend the optical path, good high temperature stability and easy cooling, simple and compact structure, and low requirements on the surface roughness of the lens. It has broad application prospects in the field of ultra-high resolution X-ray diagnostic science and technology. In recent years, research on various X-ray diagnostic techniques based on X-ray combined lenses is very active. For example, high-energy X-ray fluorescence micro-tomography experimental system for element distribution measurement in s...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G21K1/06
Inventor 乐孜纯董文
Owner HUAWEI TEHCHNOLOGIES CO LTD
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