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Device and method for measuring electrostriction coefficient by multi-beam laser heterodyne method

A laser heterodyne and multi-beam technology, applied in the field of measurement, can solve problems such as unsatisfactory measurement accuracy

Inactive Publication Date: 2012-11-07
HARBIN INST OF TECH
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0006] In order to solve the problem that the measurement accuracy of the existing methods for measuring the electrostriction coefficient of various piezoelectric crystals cannot meet the requirements of the existing high-precision measurement field, the present invention proposes a multi-beam laser heterodyne method for measuring electrostriction Apparatus and method for coefficients

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  • Device and method for measuring electrostriction coefficient by multi-beam laser heterodyne method
  • Device and method for measuring electrostriction coefficient by multi-beam laser heterodyne method
  • Device and method for measuring electrostriction coefficient by multi-beam laser heterodyne method

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specific Embodiment approach 1

[0022] Specific implementation mode one: see figure 1 Describe the present embodiment, the device of multi-beam laser heterodyne measurement electrostriction coefficient described in the present embodiment is composed of Ho solid-state laser 2, quarter-wave plate 12, vibrating mirror 13, first plane mirror 3, polarizer Beam splitter PBS11, converging lens 10, thin glass plate 9, second plane mirror 6, piezoelectric ceramic tube to be tested 7, two-dimensional adjustment frame 8, high voltage power supply, photodetector 4 and signal processing system 5;

[0023] The linearly polarized light emitted by the Ho solid-state laser 2 is reflected by the first plane reflector 3 and then enters the polarizing beam splitter PBS11, and the light beam reflected by the polarizing beam splitting mirror PBS11 is transmitted by the quarter-wave plate 12 and then enters the vibrating beam. The light receiving surface of the mirror 13, the light beam reflected by the oscillating mirror 13 is tr...

specific Embodiment approach 2

[0027] Specific embodiment two: this embodiment is to further limit the structure of the signal processing system 5 in the device for measuring the electrostrictive coefficient by the multi-beam laser heterodyne method described in the specific embodiment one, the signal processing system in the present embodiment 5 is composed of a filter circuit 5-1, a preamplifier circuit 5-2, an analog-to-digital conversion circuit A / D and a control circuit DSP, and the filter circuit 5-1 filters the received electrical signal output by the photodetector 4 Send to preamplifier circuit 5-2 afterwards, the signal output after described preamplifier circuit 5-2 amplifies to analog-to-digital conversion circuit A / D, and described analog-to-digital conversion circuit A / D sends the signal after conversion To the control circuit DSP.

specific Embodiment approach 3

[0028] Specific embodiment three: what this embodiment describes is the method for measuring the electrostrictive coefficient by means of the multi-beam laser heterodyne method described in the specific embodiment one or two to measure the electrostrictive coefficient, and the process of the method is:

[0029] First, by adjusting the two-dimensional adjustment frame 8, the reflection surface of the second flat mirror 6 fixedly connected with the piezoelectric ceramic tube 7 to be tested is parallel to the thin glass plate 9, and the height between the two plates is equal, and the first The distance d between the reflective surface of the two plane mirrors 6 and the thin glass plate 9 is 20mm;

[0030] Then, connect the two electrode output terminals of the high-voltage power supply to the inner surface and the outer surface of the piezoelectric ceramic tube 7 to be measured through the electrodes, and turn on the driving power of the vibrating mirror 13 to make the vibrating ...

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Abstract

The invention provides a device and a method for measuring an electrostriction coefficient by a multi-beam laser heterodyne method, relating to the technical field of measurement, in particular to a the electrostriction coefficient measuring technology. The invention solves the problem that the measurement precision of the various traditional method for measuring the electrostriction coefficient of piezoelectric crystal cannot satisfy the requirements of current high-precision measurement fields. The method disclosed by the invention is designed on the basis of the laser heterodyne technologyand the Doppler effect; the device modulates the frequency of incident light at different moments in a light path by using a galvanometer so as to obtain a multi-beam laser heterodyne signal, whereinthe signal frequency spectrum comprises a plurality of frequency values; each frequency value includes to-be-measured parameter information; a plurality of to-be-measured parameter values can be simultaneously obtained after demodulation; and weighted mean is carried out on the obtained parameter values to obtain high-precision to-be-measured parameters. The method disclosed by the invention is verified by a simulation experiment of lead zirconate titanate (PZT) piezoceramics, and the measurement relative error is only 0.98%.

Description

technical field [0001] The invention relates to the field of measurement technology, in particular to a measurement technology of electrostriction coefficient. Background technique [0002] In all electromechanical systems and devices involved in automatic control, the driver is often considered to be one of the most critical factors limiting its performance and life. Among the many types of drivers, piezoelectric / electrostrictive drivers are due to their fast response, It has attracted much attention because of its high bearing capacity, low energy consumption and low price. At present, piezoelectric / electrostrictive drivers have been successfully applied in many technical fields such as laser resonator, precision positioning, precision machining, intelligent structure, bioengineering, aerospace, electronic communication, automobile industry, robot joints, medical equipment, etc., and An industry with great potential is being formed. Therefore, the development and applica...

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G01N21/45
Inventor 李彦超王春晖高龙曲杨
Owner HARBIN INST OF TECH