Large-scale preparation method of niobium pentoxide nanowires and hydrogen-sensitive element thereof

A niobium pentoxide nanometer, large-area technology, applied in chemical instruments and methods, electrical components, nanotechnology, etc., can solve the problems of high cost, low repeatability, disadvantage, etc., to reduce equipment and production costs, improve The effect of surface area, low power consumption
CN102180518AInactive Publication Date: 2011-09-14武汉正光恒远科技有限公司

Patent Information

Authority / Receiving Office
CN · China
Patent Type
Applications(China)
Current Assignee / Owner
武汉正光恒远科技有限公司
Publication Date
2011-09-14
Estimated Expiration
Not applicable · inactive patent

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Abstract

The invention discloses a large-scale preparation method of niobium pentoxide nanowires and a hydrogen-sensitive element thereof. The preparation method particularly comprises the following steps of: strictly cleaning Nb foils cut into suitable sizes, arranging the foils in a vacuum tube type furnace after a bending or folding treatment, and strictly controlling processing conditions (such as Ar flow rate, O2 flow rate, holding temperature, time and the like) of a thermal oxidation process to synthesize large-scale Nb2O5 nanowires with higher length diameter ratios. By adopting the large-scale preparation method disclosed by the invention, the large-scale synthesis of the Nb2O5 nanowires with the higher length diameter ratios can be realized in a limited-volume furnace tube, thus the production cost can be effectively reduced. Hydrogen-sensitive elements manufactured from Pt electrodes, prepared by sputtering Nb2O5 nanowires as sensitive materials, have the characteristics of small size, low energy consumption and the like, and represent higher response speed and higher sensitivity at the room temperature towards a hydrogen-containing atmosphere; and the size, the energy consumption and the production cost of hydrogen sensors can be hopefully reduced.
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Description

technical field

[0001] The invention relates to a large-area preparation method of niobium pentoxide nanowire (and its hydrogen sensitive element), which belongs to the technical field of inorganic semiconductor nanometer material preparation technology. Background technique

[0002] Hydrogen is an ideal renewable clean energy. Its flammability and explosiveness caused by its low flash point make hydrogen sensors particularly important in chemical and safety fields such as fire alarms, gas leakage, and combustion control. In addition, in medical fields such as detecting bacterial infection, hydrogen sensors also have high application value. metal oxide semiconductor (TiO 2 , ZnO and SnO 2 etc.) Thin-film hydrogen sensor is currently the most researched type of hydrogen sensor, and the concentration of hydrogen can be detected by using the change degree of the resistance value of the sensitive element in the hydrogen-containing atmosphere. However, at present, the semicond...

Claims

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