Method for forming grating for machine tool measurement in two-step solidifying rolling pressing forming manner

Abstract

The invention relates to a method for forming a grating for machine tool measurement in a two-step solidifying rolling pressing forming manner, which comprises the following steps: 1) coating an ultraviolet light solidifying adhesive layer on a grating blank substrate; 2) manufacturing a rolling mould having a prototype grating structure on the surface of a cylindrical mould, making an alignment mark, and polishing and performing low surface energy treatment on the surface of the rolling mould; 3) coating a flexible film on the adhesive layer on the grating blank substrate, carrying out primary exposure and peeling the film; 4) comparing the alignment mark on the grating blank substrate with an acquired alignment mark image on the surface of the rolling mould, adjusting and calibrating; 5) gluing the rolling mould with the grating, applying a pressing force, and compounding the prototype grating structure on the surface of rolling mould on the adhesive layer on the surface of the substrate; 6) carrying out exposure on the compounded ultraviolet light solidifying adhesive layer; and 7) collecting and packaging the grating. According to the method, the required pressing force is small, and thus, the substrate deformation and stress concentration are avoided. The method has high production efficiency and can be used for realizing the mass production of the grating for large-area and altitude machine tool measurement.

Description

technical field [0001] The invention relates to the field of grating manufacturing and processing for machine tool measurement, in particular to a roll embossing forming method for three-dimensional functional microstructures in the manufacture of large-area long gratings for machine tool measurement. Background technique [0002] The basis of metrology grating technology is Moire fringes (Moire fringes). In 1874, the British physicist L.Rayleigh first proposed the engineering value of this pattern. It was not until the 1950s that people began to use the Moire fringes of gratings for precise measurement. . In 1950, Heidenhain in Germany pioneered the DIADUR replication process, that is, the lithographic replication process of evaporating chrome plating on a glass substrate. Only in this way can high-precision and low-cost grating scales be manufactured, and grating measuring instruments can be accepted by users and enter the commodity market. [0003] As an important part o...

AI Technical Summary

Problems solved by technology

The lithography method requires a large investment in equipment, and the cost of mass production remains high

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