Deep ultraviolet laser photoluminescent spectrometer

Abstract

The invention relates to a deep ultraviolet laser photoluminescent spectrometer, which comprises a full solid deep ultraviolet laser, a vacuum sample chamber, a vacuum monochrometer, a first vacuum maintaining system, a second vacuum maintaining system, a low-temperature system, a temperature control device, a sample frame three-dimensional adjusting device, a stable state emission spectrum detection system, a time resolution spectrum detection system, a vacuum leakage safety system and a computer control device, wherein the vacuum sample chamber is connected with the full solid deep ultraviolet laser; the vacuum monochrometer is connected with the vacuum sample chamber; the first vacuum maintaining system is connected with the vacuum sample chamber; the second vacuum maintaining system is connected with the vacuum monochrometer; the low-temperature system and the temperature control device and the vacuum sample chamber are connected by a flange; the sample frame three-dimensional adjusting device is connected with the vacuum sample chamber; the stable state emission spectrum detection system is connected with the vacuum monochrometer; the time resolution spectrum detection system is connected with the vacuum monochrometer; the first control end and the second control end of the vacuum leakage safety system are connected with the first vacuum maintaining system, the third control end and the fourth control end of the vacuum leakage safety system is connected with the second vacuum maintaining system, and the fifth control end of the vacuum leakage safety system is connected with the low-temperature system and the temperature control device; and the computer control device is used for controlling the vacuum leakage safety system, the vacuum monochrometer, the low-temperature system, the temperature control device, the sample frame three-dimensional adjusting device, the stable state emission spectrum detection system and the time resolution spectrum detection system.

Description

technical field [0001] The invention belongs to the field of spectroscopic instruments and spectroscopic technology, in particular to a deep ultraviolet laser photoluminescence spectrometer. Background technique [0002] Spectroscopy is an important test method to study the physical and chemical properties of matter by using the interaction between light waves and matter. It plays an important role in the research of material physics and the characterization of material properties. Taking semiconductor materials as an example, important information such as the lattice structure, electronic band structure, impurities, defects, surface states, and carrier transport of materials can be obtained using spectroscopy. In spectroscopic technology and spectroscopic instruments, the light source is the basis. Before the appearance of lasers, thermoluminescence (such as halogen lamps, silicon carbide rod lamps), gas discharge (such as deuterium lamps, xenon lamps) and other methods we...

AI Technical Summary

Problems solved by technology

Up to now, there is no laser photoluminescence spectroscopy instrument using an all-solid-state deep ultraviolet laser as a light source in the world.

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