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Gas sensor based on novel SnO2 nano material and manufacturing method thereof

A gas sensor, a new type of technology, applied in the analysis of materials, material analysis by electromagnetic means, instruments, etc., can solve the problems of high cost and low sensitivity of synthetic materials, and achieve high sensitivity, good repeatability, and easy raw materials.

Inactive Publication Date: 2011-11-09
SHANGHAI GEZHI HIGH SCHOOL
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

However, these sensors have disadvantages such as relatively low sensitivity and high cost of synthetic materials in practical applications.

Method used

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  • Gas sensor based on novel SnO2 nano material and manufacturing method thereof
  • Gas sensor based on novel SnO2 nano material and manufacturing method thereof
  • Gas sensor based on novel SnO2 nano material and manufacturing method thereof

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0019] In the first step, interdigitated electrodes were prepared on the surface of the single crystal silicon substrate; in the second step, the substrate was cleaned and dried; in the third step, a small amount of synthesized SnO 2 The nanorod single crystal thin film material is placed in a deionized propylene glycol solution and ultrasonicated for five minutes to make it discrete; in the fourth step, the sample is first placed in an oven at 125°C for 60 minutes, and then aired in a ventilated place for 48 hours; fifth In the first step, connect the circuit to make the gas sensor work in the air for 24 hours. In the sixth step, put the concentration of 100ppm CH 3 CH 2 Tested in OH atmosphere.

Embodiment 2

[0021] In the first step, interdigitated electrodes were prepared on the surface of the single crystal silicon substrate; in the second step, the substrate was cleaned and dried; in the third step, a small amount of synthesized SnO 2 Put the nanorod single crystal material into the deionized propylene glycol solution for five minutes to make it discrete; in the fourth step, put the sample in an oven at 100°C for 60 minutes, and then dry it in a ventilated place for 48 hours; the fifth step In the middle, connect the circuit, make the gas sensor work in the air for 24 hours first. In the sixth step, put it into a CO atmosphere for testing.

Embodiment 3

[0023] In the first step, interdigitated electrodes were prepared on the surface of the single crystal silicon substrate; in the second step, the substrate was cleaned and dried; in the third step, a small amount of synthesized SnO 2 Put the nanorod single crystal material into the deionized propylene glycol solution for five minutes to make it discrete; in the fourth step, put the sample in an oven at 110°C for 60 minutes, and then dry it in a ventilated place for 48 hours; the fifth step In the middle, connect the circuit, make the gas sensor work in the air for 24 hours first. In the sixth step, put CH 4 Test in atmosphere.

[0024] Therefore, the advantage of the present invention is:

[0025] 1. The preparation method of the present invention does not need to rely on micro-nano observation and operation instruments, and the sensing conductor used is the large-scale production of large-scale production of the surface band node SnO 2 Nanorod single crystal material, the ...

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Abstract

The invention relates to a gas sensor based on a novel SnO2 nanorod monocrystalline material. The gas sensor comprises a substrate, an interdigital metal electrode layer and a sensing conductor, wherein the interdigital metal electrode layer is arranged on the substrate, and the sensing conductor is made of a SnO2 nanorod monocrystalline material with nodes on the surface and is arranged on the interdigital metal electrode layer. Since the sensing conductor of the gas sensor based on the novel SnO2 nanorod monocrystalline material is made of the SnO2 nanorod monocrystalline material with nodes on the surface, which can be produced on a large scale, and the SnO2 nanorod monocrystalline material is simple and easy to produce and has good repeatability and low production cost, the raw materials of the SnO2 nanorod monocrystalline material are easy to obtain; moreover, the SnO2 nanorod monocrystalline material consists of a large amount of nanorods in microstructure and has high surface ratio, therefore, the gas sensor has high sensitivity and is expected to be applied to industrial safety and other fields significantly.

Description

technical field [0001] The invention relates to a gas sensor and a preparation method thereof, in particular to a SnO sensor based on a surface-burden node 2 A gas sensor of a nanorod single crystal thin film material and a preparation method thereof. Background technique [0002] Gas sensors are usually used to detect specific components in gases, to detect toxic and harmful gases, to provide safety alarms for flammable and explosive gases, to detect, analyze and research gases to be understood, etc. At present, there are mainly two types of gas sensors used in industrial production, one is a gas sensor based on electrochemical principles; the other is a gas sensor based on a semiconductor oxide material as a sensing conductor. Generally speaking, the smaller the particle size of the material used as a sensing conductor, the larger the surface area, the greater the interaction between the sensor and the gas contact, and the higher the sensitivity. Due to the huge surface ...

Claims

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Application Information

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IPC IPC(8): G01N27/00
Inventor 黄雨健
Owner SHANGHAI GEZHI HIGH SCHOOL
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