Novel method for manufacturing chip diode
A manufacturing method and diode technology, applied in semiconductor/solid-state device manufacturing, electrical components, circuits, etc., can solve the problems of high energy consumption, high complexity, and high cost, and achieve the effects of reducing pollution, reducing corrosion, and improving high-temperature performance.
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[0013] A kind of manufacturing method of chip diode, it comprises the following steps:
[0014] (1) Put the two copper lead electrodes, welding pieces, and diode chips into the fixture, and send them to the welding furnace to heat up, and the temperature is t 1 For: 290℃≤t 1 ≤305℃, temperature control time h 1 For: 14 minutes ≤ h 1 ≤16 minutes, use nitrogen as the shielding gas during welding;
[0015] (2) Slowly drop the diode material in step (1) to t with the temperature of the welding furnace 2 For: 95℃≤t 2 ≤105℃, temperature control time h 2 For: 28 minutes ≤ h 2 ≤32 minutes;
[0016] (3) the diode material of step (2) is packed in the pickling dish;
[0017] (4) Carry out pickling to the diode material of step (3), the pickling liquid is: HF: HNO 3 :HAC:H 2 SO 4 =9:9:12:4, the volume ratio etch to remove the scribing mechanical damage layer, time h 3 For: 135 seconds ≤ h 3 ≤155 seconds;
[0018] (5) Use high-purity water to flow the diode material in step (...
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