Preparation method of thick film solar cell

A solar cell, thick film technology, applied in the direction of circuits, electrical components, final product manufacturing, etc., can solve the problems of low photoelectric conversion rate, harsh production conditions, and high production cost of solar cells, to improve cell output, increase carrier life, and the effect of improving photoelectric conversion efficiency

Inactive Publication Date: 2011-11-23
孙昌红
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0007] The present invention is achieved through the following technical means: Aiming at the problems of high production cost, harsh production conditions and low photoelectric conversion rate of solar cells, using innovative technologies such as microwave low-temperature plasma deposition technology and new laser scanning, a low-cost, Flexible substrate polysilicon / amorphous silicon stacked thick-film solar cells that are easy to produce and have high photoelectric conversion efficiency

Method used

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Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0025] The flexible substrate polysilicon / amorphous silicon stacked thick film solar cell is prepared according to the following steps:

[0026] (1) Preparation and surface treatment of flexible substrate: Quartz or stainless steel is cut to obtain a 156mm*156mm quartz substrate / stainless steel substrate, soaked in glass washing solution / stainless steel washing solution for 12 hours, and then put Wash in acetone, then wash with absolute ethanol, and dry to obtain a flexible substrate;

[0027] (2) Deposition and heat treatment of silicon nitride insulating layer: put the cleaned and dried substrate into the PECVD vacuum chamber, and start to heat up while flushing the vacuum. When the temperature of the vacuum chamber rises to 200°C and remains stable, the The vacuum chamber is filled with 10% SiH diluted by N2 4 and NH 3 to 4Pa, where the gas flow ratio of SiH4 and NH3 is 35:12, and then add radio frequency power discharge, the power density is 0.2W / cm 2 , first deposited ...

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PUM

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Abstract

The invention discloses a preparation method of a thick film solar cell. The thick film solar cell is a flexible substrate amorphous silicon / polycrystalline silicon laminated heterojunction cell, wherein a polycrystalline silicon layer is obtained by crystallizing a small-particle polycrystalline silicon layer at low temperature, and has a small thickness, so that waste of a silicon material is reduced greatly, and the cost is lowered remarkably. The thick film solar cell prepared with the method has the characteristics of low cost, high yield, easiness for production and high photoelectric conversion efficiency of the obtained product.

Description

technical field [0001] The invention relates to a method for preparing a thick-film solar cell, in particular to a method for preparing a flexible substrate polysilicon / amorphous silicon stacked thick-film solar cell. Background technique [0002] Solar energy is one of the cleanest renewable energy sources and is being used more and more widely around the world. There are two ways to use solar energy: photothermal conversion and photoelectric conversion. The use of solar power to generate electricity will not cause greenhouse effect and acid rain, and will not cause environmental hazards such as nuclear leakage. It is of great significance to environmental protection and the development of a low-carbon economy. [0003] A solar cell is a device that directly converts light energy into electrical energy through the photoelectric effect or photochemical effect. At present, crystalline silicon is the most common material used in solar cells. The manufacturing technology of cr...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): H01L31/20
CPCY02P70/50
Inventor 李成敏
Owner 孙昌红
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