Method for continuous production of tetrafluorosilane by using various fluorine-containing substances, amorphous silica and sulfuric acid

A technology of amorphous silica and tetrafluorosilane, applied in chemical instruments and methods, inorganic chemistry, halogenated silanes, etc., can solve the problems of expensive metallurgical silicon and high production costs

Inactive Publication Date: 2011-12-14
KCC CORP CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

However, this method has the problem of high production cost, because the metallurgical silicon (Si) powder used is very expensive

Method used

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  • Method for continuous production of tetrafluorosilane by using various fluorine-containing substances, amorphous silica and sulfuric acid
  • Method for continuous production of tetrafluorosilane by using various fluorine-containing substances, amorphous silica and sulfuric acid
  • Method for continuous production of tetrafluorosilane by using various fluorine-containing substances, amorphous silica and sulfuric acid

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0055] By adopting such as figure 1 The rotary kiln reactor shown is for the continuous production of tetrafluorosilane. The temperature of the reactor was directly increased by the LPG burner, and the solid raw material was dried in a calciner with an internal temperature of 350° C. for 30 minutes before using it.

[0056] Dry sodium tetrafluoroaluminate feedstock (6.87 kg / hr) and silica fume (3.66 kg / hr) with a silica content of 90% were fed into the reactor through line (1) at the same time at a concentration of 98% sulfuric acid (10.7 kg / hr) is fed through line (2).

[0057] In order to stir the raw materials smoothly, the reactor is equipped with an internal screw. Tetrafluorosilane gas is generated immediately after the reactants are fed. The gas discharged via line (3) is passed through H 2 SO 4 scrubber and subsequently collected. After the reaction was maintained for 12 hours, the analysis from H 2 SO 4 Product sampled in scrubber and final storage tanks. The...

Embodiment 2 to 5

[0058][Example 2 to 5] Production of tetrafluorosilane by using silica fume

[0059] In Examples 2 to 5, the fluoride source substances were changed as shown in Table 1 below. Using SiO 2 Silica fume (3.66 kg / hr) with a content of 90% was used as a raw material for silica. Production equipment and procedures were the same as those in Example 1. After 12 hours of reaction, the generated gas was analyzed in the same manner as in Example 1. The results of the analysis are listed in Table 1 below.

[0060] [Table 1]

[0061]

Embodiment 6 to 10

[0062] [Examples 6 to 10] Production of tetrafluorosilane by using diatomaceous earth

[0063] In Examples 6 to 10, the fluoride source substances were changed as shown in Table 2 below. Using SiO 2 Diatomaceous earth (3.74 kg / hr) with a content of 88% was used as the silica raw material. Production equipment and procedures were the same as those in Example 1. After 12 hours of reaction, the generated gas was analyzed in the same manner as in Example 1. The results of the analysis are listed in Table 2 below.

[0064] [Table 2]

[0065]

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Abstract

The present invention relates to a method of continuously producing tetrafluorosilane (SiF4) by using various fluorinated materials, amorphous silica (SiO2) and sulfuric acid (H2SO4). According to the present invention, the yield of tetrafluorosilane can increase and it can be continuously produced in an environmentally friendly manner with low cost. In addition, the amount of hydrogen fluoride generated during the reaction is minimized and thus the corrosion of devices can be minimized, and the pipeline blockage and yield decrease of SiF4 can be prevented by passing the reaction product which is a mixture gas of SiF4 and water through an H2SO4 scrubber at a high temperature to remove water, which can prevent the generation of silica gel and hexafluorosilicic acid by the side-reaction of condensed water and SiF4.

Description

technical field [0001] The present invention relates to a kind of by adopting various fluorine-containing substances, amorphous silicon dioxide (SiO 2 ) and sulfuric acid (H 2 SO 4 ) Continuous production of tetrafluorosilane (SiF 4 )Methods. More specifically, the present invention relates to a process by reacting (i) a fluoride source material capable of reacting with sulfuric acid to produce hydrogen fluoride (HF), (ii) amorphous silica, and (iii) sulfuric acid in a single reactor; and then pass the resulting gaseous product through H 2 SO 4 Scrubber to produce tetrafluorosilane method. According to the present invention, the yield of tetrafluorosilane can be increased and it can be continuously produced at low cost in an environmentally friendly manner by using various fluorine-containing substances other than hydrogen fluoride. In addition, since the amount of hydrogen fluoride (i.e. hydrofluoric acid) generated during the reaction is minimized, the corrosion of eq...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C01B33/107
CPCC01B33/10705
Inventor 姜京勋赵燃爽金世钟
Owner KCC CORP CO LTD
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