Texturing technology for transparent conducting film as top electrode of thin film solar cell

A transparent conductive film and solar cell technology, which is applied in the field of solar energy utilization, can solve the problem that product consistency and stability are difficult to achieve for thin-film solar cells. Transparent conductive film, spray-etched surface velvet is difficult to control, and surface roughness uniformity fluctuates greatly. Large and other problems, to achieve the effect of improving reliability and stability, optimizing production cycle, and good surface uniformity

Active Publication Date: 2012-01-04
江苏汇景薄膜科技有限公司
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

The velvet degree of soaking etching surface is easy to control, the uniformity of surface roughness is good, and the velvet making process is easy to control independently. It is mostly used in manual single-piece production, with low production capacity and large-scale industrial production. Large-scale production, large output, but it is not easy to control the texture of the spray-etched surface, the unifor

Method used

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Examples

Experimental program
Comparison scheme
Effect test

example 1

[0020]Example 1. Under the condition of room temperature, the industrialized automatic continuous magnetron sputtering production line is used to deposit the transparent conductive film required by thin film solar cells on ordinary glass, and the corresponding texturing is carried out. The product performance is stable and the texturing When, the proportioning weight ratio range of oxalic acid (oxalic acid) in the etching solution is 0.15wt%; the proportioning weight ratio range of hydrochloric acid is 0.3wt%; the proportioning weight ratio range of the surface active stabilizer is 0.015wt%; The rest is deionized water, and the surface active stabilizer is an alkylphenol polyoxyethylene ether series surface active stabilizer. The automatic soaking time is 35 seconds, the temperature is stable at 22°C, the automatic cleaning is 4 times, and the temperature is stable at 25°C. The drying temperature and this adjustment range are 55°C. The light transmittance of the film after te...

example 2

[0021] Example 2. Under the condition of room temperature, the industrialized automatic continuous magnetron sputtering production line is adopted to deposit the transparent conductive film required by the thin-film solar cell on the tempered glass first, and the corresponding texturing is carried out. The product performance is stable. When making texture, the proportioning weight ratio range of oxalic acid (oxalic acid) in the etching solution is 0.25wt%; the proportioning weight ratio range of hydrochloric acid is 0.35wt%; the proportioning weight ratio range of surface active stabilizer is 0.015wt% %; the rest is deionized water, and the surface active stabilizer is alkylphenol polyoxyethylene ether series surface active stabilizer. The automatic soaking time is 45 seconds, the temperature is stable at 22°C, the automatic cleaning is 4 times, and the temperature is stable at 25°C. The drying temperature and this adjustment range are 65°C. The light transmittance of the fi...

example 3

[0022] Example 3: Under the condition of room temperature, the industrialized automatic continuous magnetron sputtering production line is adopted to deposit the transparent conductive film required by the thin film solar cell on the common plexiglass, and the corresponding texturing is carried out. The performance of the product is stable and the production When velvet, the proportioning weight ratio range of oxalic acid (oxalic acid) in the etching solution is 0.15wt%; the proportioning weight ratio range of hydrochloric acid is 0.3wt%; the proportioning weight ratio range of surface active stabilizer is 0.015wt% ; The rest is deionized water, and the surface active stabilizer is an alkylphenol polyoxyethylene ether series surface active stabilizer. The automatic soaking time is 35 seconds, the temperature is stable at 22°C, and the automatic cleaning is 5 times, and the temperature is stable at 25°C. The drying temperature and this adjustment range are 50°C. The light tran...

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Abstract

The invention discloses a texturing technology for a transparent conducting film as a top electrode of a thin film solar cell. The technology successively comprises the following operational steps: immersing, cleaning and drying. According to the immersing, the cleaning and the drying steps, an automatic control method is employed to carry out automatic and continuous immersing, etching and texturing. A solution for etching of a transparent conducting film is composed of oxalic acid, hydrochloric acid, a surface active stabilizer and deionized water as well as particularly comprises, by weight: 0.1% to 1.5% of the oxalic acid; 0.3% to 2.5% of the hydrochloric acid; 0.01% to 0.5% of the surface active stabilizer; and the balance being the deionized water. According to the invention, an etching solution that is prepared autonomously and an integrated matching of various technologies including an automatic up-and-down feeding technology, an automatic temperature adjusting technology, an automatic immersing technology, an automatic cleaning technology, an automatic drying technology and an automatic monitoring and control technology and the like are utilized, so that industrially automatic and continuous immersing and etching production of the transparent conducting film that is needed by the thin film solar cell is realized.

Description

technical field [0001] The invention relates to the technical field of solar energy utilization, in particular to a texturing process of a transparent conductive film for a front electrode of a thin film solar cell. Background technique [0002] Thin-film solar cells are thin-film photoelectric devices that convert the sun's light energy into direct current (DC) electricity. Transparent conductive films are necessary in the structure of thin-film solar cells. Transparent conductive films are used as front electrodes in thin-film solar cells, that is, solar cells The generated electricity is collected and extracted, and it must be maximized to allow sunlight to pass through. This requires that the transparent conductive film used as the front electrode of the thin film solar cell has a high transmittance to sunlight, and at the same time must have a low sheet resistance to reduce the loss of ohmic contact. In order to maximize the photoelectric conversion efficiency of thin-...

Claims

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Application Information

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IPC IPC(8): H01L31/18
CPCY02P70/50
Inventor 周钧
Owner 江苏汇景薄膜科技有限公司
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