Vacuum ion plating method of wear-resisting layer on inner wall of metal cylinder

Abstract

The invention provides a vacuum ion plating method of a wear-resisting layer on the inner wall of a metal cylinder. According to the invention, metal end caps with insulating, sealing and separating functions are arranged on two ends of the metal cylinder. A vacuum pumping pipe and a heating power supply input port are arranged on the end caps, such that temperature requirements of vacuuming and plating can be satisfied. An auxiliary anode applied with a biasing electrode is arranged in the cylinder. A hollow or solid column-shaped target material is positioned at the center of the cylinder. An arc welding power supply is applied on the target material. The metal cylinder is conducted to the other pole of the arc welding power supply. An auxiliary anode which can rotate or swing is arranged on the end cap of the metal cylinder. According to the invention, the cylinder is provided with a rotary sealing apparatus, and arc welding power supplies which operate independently are applied onboth ends of the target material. The structure provided by the invention can be manufactured into mobile and portable equipment used for plating pipes requiring bottom wear-resisting layers, and especially pipe walls of pipes with large calibers.

Description

technical field [0001] The invention relates to a plasma vacuum coating method and device for the inner wall of a metal cylinder. Background technique [0002] Plasma vacuum coating method has been relatively popular -------- using magnetron columnar arc source multi-arc ion coating, the device is to install a rotating magnetron columnar arc source (tubular) in the center of the coating chamber. It consists of a coating chamber, a workpiece turret, a magnetically controlled columnar arc source, an air inlet (different working gases need to be fed in when plating different materials) system, an arc source power supply, a workpiece heating source, an arc ignition system, a vacuum system, and a workpiece bias power supply composition. The column arc source is made of tubular metal material as the target material, and several bar-shaped permanent magnets are installed in the tube, and the permanent magnets move (including rotation and reciprocating motion) in the target tube. ...

AI Technical Summary

Problems solved by technology

However, the above method has many deficiencies: However, the existing multi-arc ion coating method produces thick multi-arc ion particles with fog drop phenomenon, the arc is concentrated on the magnetic ring, and the etching of the tubular target is uneven. The target surface must be corrected, and the distance between the magnet and the target needs to be adjusted in time. The low utilization of the target also greatly affects the working efficiency of vacuum plating; another disadvantage is that the ion beam of the multi-arc tubular target is dispersed, and the arc light is loose. Irregularity, serial movement on the surface of the target tube, uneven etching on the surface of the target tube, easy to produce grooves on the surface of both ends of the target tube, greatly affecting the service life of the target, this is because the arc is pulled by the outer motor to pull the target tube inside The magnetic steel moves back and forth, and the magnetic steel is easy to demagnetize under the high temperature condition in the tube, thus affecting the arc striking effect. The above shortcomings have a great impact on the quality and production efficiency of ion plating

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