Production and detection method of plated bismuth gold micro-array electrode for detecting heavy metals
A technology of microarray electrode and manufacturing method, which is applied to the technology for producing decorative surface effects, metal material coating technology, microstructure technology, etc., can solve problems such as volatility and human body hazards, and facilitate miniaturization , The processing technology is mature, and the effect of improving the detection safety
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[0026] 1. Fabrication of gold microarray electrodes
[0027] 1) Silicon oxidation
[0029] First place the wafer in 30% H 2 o 2 and H 2 SO 4 Prepare the cleaning solution in a ratio of 1:5, heat it in an electric furnace for 20 minutes, then clean it with deionized water after cooling, then blow dry it with nitrogen, and finally bake it in an oven at 120°C for 30 minutes to remove the water. steam.
[0030] b. Oxidation to produce silica
[0031] Growth of SiO on silicon surface 2 The methods generally include chemical vapor deposition and thermal oxidation. The equipment for chemical vapor deposition of oxides is relatively expensive, and the production cost of producing oxide layers is relatively high, and it is usually used when low temperatures are required. The manufacturing cost of thermal oxidation is relatively low, but the structure must be able to withstand high temperature treatment, silicon thermal oxidation has two kinds of...
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