Crystal, and method and device for casting same

A technology of crystal and single crystal, applied in the field of crystal and its casting and device, can solve the problems of difficult control of temperature gradient, difficult to achieve, no silicon single crystal, etc., to reduce manufacturing difficulty and manufacturing cost, low cost, and increase heat The effect of spreading efficiency

Inactive Publication Date: 2012-03-21
赵钧永
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

However, this method has so far only been used to grow crystals with relatively small sizes, especially crucibles with good thermal conductivity such as molybdenum and tungsten metals or graphite, and has not been used to grow large-sized silicon single crystals.
At larger sizes, the control of the temperature gradient becomes difficult to achieve due to the thermal conductivity of the seed crystal and the resulting crystal and the heat dissipation problem at the bottom of the crucible

Method used

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  • Crystal, and method and device for casting same
  • Crystal, and method and device for casting same
  • Crystal, and method and device for casting same

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Embodiment Construction

[0056] figure 1 In a preferred embodiment of the present invention, the positional relationship of the melt-solidified bottomless crucible sleeve, the seed crystal, the thermally insulating region, the crystal raw material and the heat sink is shown. figure 1 Among them, a seed crystal 2 is placed at the bottom of the bottomless crucible sleeve 1, and the seed crystal basically covers the bottom of the whole crucible sleeve, constitutes the bottom wall of the crucible sleeve, and together with the crucible sleeve forms a crucible for accommodating the melt. An optional thermally insulating region 3 placed in the crucible separates the seed crystal 2 and the crystal feedstock 4 or a melt of feedstock and consists of a thermal insulator. Wherein, between the thermally insulating region and the seed crystal, a part of granular crystal raw material 41 is optionally included to form a part of the crystal raw material separating region separating the thermally insulating region and ...

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Abstract

The invention generally relates to a crystal casting method using seed crystals, such as a directional solidification casting method. The crystal casting method includes a temperature gradient solidification method for manufacturing larger crystal materials in preset crystal orientation, wherein the crystal materials include polycrystalline materials and monocrystalline materials, and particularly include silicon or silicon germanium materials applicable to semiconductor and photovoltaic application. An existing crystal casting method using seed crystals has the problems of high energy consumption, more control difficulty, more impurity particles, easiness in generating mixed crystals, difficulty in obtaining large-sized monocrystalline materials and the like. The crystal casting method solves the problems by the aid of a bottomless crucible or a crucible with a notch at the bottom, a heat insulation area and a heat insulation position, fine crystal growth effect is achieved, the obtained casting monocrystalline or polycrystalline materials such as silicon or silicon germanium crystals have fewer defects or impurities, fine quality and excellent performance, and are applicable to the semiconductor and photovoltaic field.

Description

technical field [0001] The present invention generally relates to crystal casting methods using seed crystals, such as directional solidification casting methods, including temperature gradient solidification methods, such as vertical temperature gradient solidification methods (hereinafter also referred to as VGF methods) or vertical Bridgman methods (hereinafter also referred to as VGF methods) The VB method) or the Vertical Bridgeman Stoke Barger method (VBS method) produce relatively large crystalline materials of predetermined orientations, including polycrystalline and monocrystalline materials, especially suitable for semiconductor and photovoltaic applications such as silicon or Silicon germanium material. Background technique [0002] Crystalline materials have excellent properties for industrial applications based on their specific microstructure, which tend to be pursued as much as possible in the manufacture of crystals. Taking crystalline silicon materials as a...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C30B11/14C30B11/00C30B29/06H01L31/18
CPCY02P70/50
Inventor 赵钧永
Owner 赵钧永
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