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Metal film micron-scale thermocouple device

A metal thin film and thermocouple technology, applied in instruments, thermometers, measuring heat, etc., can solve the problems of the flatness of the test plane, the stability and accuracy of the thermocouple, etc., and achieve a simple and easy temperature measurement method and improve accuracy Accuracy and stability, the effect of accurate temperature measurement

Inactive Publication Date: 2012-04-18
PEKING UNIV
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  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

Due to the need to bond two materials, various interface effects will inevitably be introduced during the preparation process, such as impurities, thermal stress between different materials, and parasitic electrical impedance, etc., which will affect the stability and accuracy of the thermocouple; For thin-film thermocouples, double-layer materials not only require double processes, but also the superimposition of film thickness at the junction of the films will also affect the flatness of the test plane.

Method used

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  • Metal film micron-scale thermocouple device
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  • Metal film micron-scale thermocouple device

Examples

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example 1

[0019] 1. Design and manufacture a mask plate with a single metal thin film thermocouple. The width of the two arms of the thermocouple is 1.5 microns and 200 microns respectively;

[0020] 2. Select glass as the substrate, and obtain a circular substrate with a diameter of 2 inches and a thickness of 0.6 mm through cutting and grinding processes. Clean the substrate with acetone, alcohol, and deionized water in an ultrasonic cleaner for 5 minutes to ensure the surface is clean;

[0021] 3. After the substrate is cleaned, select the 5350 photoresist (German ALLRESIST company) commonly used in the microelectronics process, and make the photoresist evenly adhere to the surface of 1 μm through a homogenizer at a speed of 4000 rpm for 1 minute. Bake for 30 minutes at celsius. After that, use the mask plate to expose through ultraviolet light, use the MJB4 lithography machine of SUSS MicroTec Company, under the power intensity of 300W mercury lamp, expose for 2.5s, and then use AR...

example 2

[0024] 1. Design and manufacture a reticle with a single metal thin film thermocouple array, the array is composed of multiple thermocouples, and the width of each thermocouple's two arms is 3 microns and 100 microns respectively;

[0025] 2. Select glass as the substrate, and obtain a circular substrate with a diameter of 2 inches and a thickness of 0.6 mm through cutting and grinding processes. Clean the substrate with acetone, alcohol, and deionized water in an ultrasonic cleaner for 5 minutes to ensure the surface is clean;

[0026] 3. After the substrate is cleaned, select the 5350 photoresist (German ALLRESIST company) commonly used in the microelectronics process, and make the photoresist evenly adhere to the surface of 1 μm through a homogenizer at a speed of 4000 rpm for 1 minute. Bake for 30 minutes at celsius. After that, use the mask plate to expose through ultraviolet light, use the MJB4 lithography machine of SUSS MicroTec Company, under the power intensity of 3...

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Abstract

The invention provides a metal film micron-scale thermocouple device. The thermocouple device comprises an insulating substrate, and a metal film thermocouple or a thermocouple array composed of a plurality of metal film thermocouples is attached to the insulating substrate, wherein the metal film thermocouple is two doubled-up films of a single metal, the width of one narrow band is less than 20microns, and the width of the other wide band is more than 100 microns. Compared with the prior art, the metal film micron-scale thermocouple device is easy to prepare, can realize measurement on thelocal temperature of micron scale, and can realize characterization for the temperature distribution on a plane, which is in contact with the thermocouple array, by being used in a combinational array manner.

Description

technical field [0001] The invention belongs to the technical field of temperature measurement, and in particular relates to a micron-scale thermocouple and an array composed of a single-layer metal thin film. Background technique [0002] As an effective means of temperature measurement, thermocouple has the advantages of high precision and fast response, and has been widely used in various fields related to temperature. The main working principle of the thermocouple is to use the Seebeck effect, that is, to connect one end of two different conductors / semiconductors as a hot end, and the other end of the two conductors is placed in a constant temperature area as a cold end, because the thermoelectric coefficients of the two materials (that is, the conductor / The ratio of the voltage at both ends of the semiconductor to the temperature difference) is different, so the temperature difference between the hot end and the cold end will be converted into a voltage signal, and the...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01K7/04
Inventor 孙伟强刘海啸许胜勇
Owner PEKING UNIV
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