Rapid cooling device and temperature control method thereof

Abstract

The invention discloses a rapid cooling device and a temperature control method thereof. The device comprises a heating unit, a temperature detection unit, a control computer, an analog output unit, a pulse control and modulation module and a switch unit. By using a pulse width modulation method, the existing electric heating adjuster is replaced by the pulse control and modulation module which is integrated with a power supplier, a waveform conversion circuit and a comparator, the total volume of a system is reduced, group control is not required, the noise and interference are reduced, the heating of a chamber can be controlled more accurately, and the process quality of various rapidly heated targets such as wafers, solar cells, photoelectric chips and the like can be promoted.

Description

technical field [0001] The invention relates to a rapid heating and cooling device and a temperature control method thereof, in particular, pulse width modulation (Pulse Width Modulation) is used to control the start and stop of heating. Background technique [0002] Existing optoelectronic semiconductor rapid heating and cooling process equipment uses a switching capacitor relay (Switching Capacitor Relay, SCR) as a controller for output power modulation. Circuits are prone to various noises and interferences during use, and the degree of their influence will increase significantly with the number of uses. [0003] In addition, commercially available SCRs are bulky and need to be equipped with heat sinks. Therefore, power control is generally performed in groups, that is, one SCR needs to control multiple sets of heating sources at the same time, which is not conducive to the trend and demand for individual control of heating sources for heating and cooling equipment in the...

AI Technical Summary

Problems solved by technology

[0002] Existing optoelectronic semiconductor rapid heating and cooling process equipment uses a switching capacitor relay (Switching Capacitor Relay, SCR) as a controller for output power modulation. Circuits are prone to various noises and interferences during use, and the degree of their influence will increase significantly with the number of uses

[0003] In addition, commercially available SCRs are bulky and need to be equipped with heat sinks. Therefore, power control is generally carried out in groups, that is, one SCR needs to control multiple groups of heating sources at the same time, which is not conducive to the trend and demand for individual control of heating sources for heating and cooling equipment in the future.

[0004] When this existing control method is applied to the rapid temperature rise and fall process equipment of optoelectronic semiconductors, there will be noise interference between the AC and DC control signals and the output power circuit

In addition, the partition control method has fewer parameters that can be adjusted. Although the difficulty of adjustment is reduced, it also relatively sacrifices the adjustability of some areas, so that the uniformity of the reaction chamber is relatively limited.

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