The invention discloses a rapid cooling device and a temperature control method thereof. The device comprises a heating unit, a temperature detection unit, a control computer, an analog output unit, a pulse control and modulation module and a switch unit. By using a pulse width modulation method, the existing electric heating adjuster is replaced by the pulse control and modulation module which is integrated with a power supplier, a waveform conversion circuit and a comparator, the total volume of a system is reduced, group control is not required, the noise and interference are reduced, the heating of a chamber can be controlled more accurately, and the process quality of various rapidly heated targets such as wafers, solar cells, photoelectric chips and the like can be promoted.