Preparation method for Ag-Al co-doped p type ZnO film

A co-doping, p-type technology, applied in the field of chemistry and chemical engineering, can solve the problems that the p-n structure of the core components of semiconductor devices cannot be produced, the development and application of photoelectric components are limited, and it is difficult to realize p-type transformation, so as to achieve easy control, The effect of good appearance and low cost

Inactive Publication Date: 2012-06-20
KUNMING UNIV OF SCI & TECH
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

It can be seen from theoretical knowledge that because there are more intrinsic defects in ZnO, it has a high self-compensation effect on acceptor-doped ions, and the solid solubility of acceptor impurities is very low, making it difficult to achieve p-type transition, thus making semiconductor devices The p-n structure of ZnO, one of the core components, cannot be made, so the development and application of ZnO-based optoelectronic components are greatly restricted

Method used

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  • Preparation method for Ag-Al co-doped p type ZnO film

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Experimental program
Comparison scheme
Effect test

Embodiment 1

[0029] (1) Dissolve zinc acetate dihydrate in absolute ethanol to a concentration of 0.5mol / L, then add diethanolamine as a stabilizer according to the molar ratio of diethanolamine and zinc ions to 1:1, to obtain a mixed solution;

[0030] (2) Stir the mixed solution obtained in step (1) at 70°C for 30 minutes, and then press Ag + and A1 3+ accounted for Zn 2+ The mass percentage is 1% adding aluminum nitrate nonahydrate and silver nitrate, wherein Ag in aluminum nitrate nonahydrate and silver nitrate + : A1 3+ The mass ratio is 4:1, and stirring is continued for 45 minutes at 72°C;

[0031] (3) Aging the solution obtained in step (2) for 24 hours to make the solution form a sol;

[0032] (4) Clean the substrate material quartz glass with 30% hydrogen peroxide;

[0033] (5) Coating the sol obtained in step (3) on the cleaned substrate material in step (4) by using a spin coating method with a spin coating speed of 1000 rpm;

[0034] (6) Heat the coated substrate materia...

Embodiment 2

[0037] (1) Dissolve zinc acetate dihydrate in absolute ethanol to a concentration of 2mol / L, then add diethanolamine as a stabilizer according to the molar ratio of diethanolamine and zinc ions to 1:1, to obtain a mixed solution;

[0038] (2) Stir the mixed solution obtained in step (1) at 72°C for 40 minutes, and then press Ag + and A1 3+ accounted for Zn 2+ The mass percentage is 3% adding aluminum nitrate nonahydrate and silver nitrate, wherein Ag in aluminum nitrate nonahydrate and silver nitrate + : A1 3+ The mass ratio is 4:1, and stirring is continued for 30 minutes at 75°C;

[0039] (3) Aging the solution obtained in step (2) for 12 hours to make the solution form a sol;

[0040] (4) Clean the substrate material glass with 10% dilute hydrochloric acid;

[0041] (5) Coating the sol obtained in step (3) on the cleaned substrate material in step (4) by dipping and pulling at a pulling speed of 3 cm / min;

[0042] (6) Heat the coated substrate material obtained in step ...

Embodiment 3

[0045] (1) Dissolve zinc acetate dihydrate in absolute ethanol to a concentration of 1.5mol / L, then add diethanolamine as a stabilizer according to the molar ratio of diethanolamine and zinc ions to 1:1, to obtain a mixed solution;

[0046] (2) Stir the mixed solution obtained in step (1) at 75°C for 45 minutes, and then press Ag + and A1 3+ accounted for Zn 2+ The mass percentage is 5% adding aluminum nitrate nonahydrate and silver nitrate, wherein Ag in aluminum nitrate nonahydrate and silver nitrate + : A1 3+ The mass ratio is 4:1, and stirring is continued for 40 minutes at 70°C;

[0047] (3) Aging the solution obtained in step (2) for 20 hours to make the solution form a sol;

[0048] (4) Clean the substrate material quartz glass with 10% dilute sulfuric acid;

[0049] (5) Coating the sol obtained in step (3) on the cleaned substrate material in step (4) by using a spin coating method with a spin coating speed of 1600 rpm;

[0050] (6) Heat the coated substrate mate...

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Abstract

The invention relates to a preparation method for an Ag-Al co-doped p type ZnO film, which comprises the following steps: weighting a right amount of precursor zinc salt; taking an organic solvent with corresponding volume; dissolving the zinc salt into the organic solvent; adding diethanolameine as a stabilizing agent, wherein the mole weight of the diethanolameine is equal to the mole weight of zinc ions; adopting water-bath heating and continuously stirring; adding doped source aluminum nitrate and silver nitrate, and continuously stirring; taking out a solution, ageing into sol, coating a film on a substrate, and then pre-processing; and performing annealing treatment, thereby obtaining the required film. The preparation method is simple in process; the cost of equipment is low; the required raw materials are easily obtained; the uniformity of the film is excellent; the preparation method can be applied to industrialized production; and the application prospect is wide.

Description

technical field [0001] The invention relates to a method for preparing an Ag-Al co-doped p-type ZnO thin film, belonging to the technical field of chemistry and chemical engineering. Background technique [0002] The research on modern sol-gel technology began in the middle of the 19th century, using sol and gel to prepare single-component compounds. Because the temperature required to prepare glass by this method is much lower than that of the traditional high-melting method, it is also called the low-temperature synthesis method of glass. In 1939 W. Geffcken and E. For the first time, Berger used the sol-gel dipping method to coat glass plates, prepared a coating that changes the optical reflection properties of glass, and obtained a patent, and proposed the sol-gel dipping coating process for the first time in the patent literature. In 1959, German Special Glass AG began mass production of automotive rearview mirrors using sol-gel dipping coating technology. In 1962 H...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C03C17/22
Inventor 谭红琳马正洪艾国齐
Owner KUNMING UNIV OF SCI & TECH
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