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Active driving cable table

An active drive, cable table technology, applied in the field of cable table, can solve the problems of control difficulty, increase the mass of the rough moving part of the workpiece table, increase the additional torque of the cable table, etc. Effect

Active Publication Date: 2012-07-04
SHANGHAI MICRO ELECTRONICS EQUIP (GRP) CO LTD
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  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

The disadvantage of the cable table in the prior art is that the use of linear motors and "back-type" air bearings greatly increases the mass of the coarse motion part of the entire workpiece table, and increases the additional torque of the cable table for the coarse motion control of the workpiece table. It is very difficult to control

Method used

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  • Active driving cable table
  • Active driving cable table
  • Active driving cable table

Examples

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Embodiment Construction

[0021] The following will combine Figure 1 ~ Figure 2 A further detailed description will be made on the actively driven cable platform of the present invention.

[0022] figure 1 Shown is a schematic layout diagram of the precision workpiece table and the active drive cable table. The workpiece table 1 is set on the X-guiding rail 5, and the two sides of the workpiece table 1 are respectively connected to the lateral sides of the X-guiding rail 5 by means of air bearings. , the bottom of the workpiece table 1 is provided with an air bearing hole and a vacuum chamber (not shown in the figure), thereby forming an air bearing with bidirectional rigidity. The two-way stiffness mentioned here means that the air floating block (i.e. the workpiece table 1) is connected to an external pressure pump to make compressed air pass through the air floating hole to generate buoyancy, and the external vacuum pump connected to the vacuum chamber simultaneously extracts the air in the chambe...

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Abstract

The invention discloses an active driving cable table for supporting and driving pipeline facilities. The active driving cable table comprises two cable table air flotation pads, an air flotation guide rail arranged on the two cable table air flotation pads, an air flotation sliding block sleeved on the air flotation guide rail, a pipeline facility and an active driving mechanism which is connected with a flat cable and a flat pipe of the pipeline facility and used for driving the flat cable and the flat pipe to move together with the air flotation sliding block along the air flotation guide rail, wherein the air flotation guide rail is a cylindrical air flotation guide rail; a round hole is formed in the air flotation sliding block; the air flotation sliding block is sleeved on the air flotation guide rail through the round hole; and a circumferential air flotation surface is formed between the air flotation sliding block and the air flotation guide rail. According to the active driving cable table, the additional moment of the cable table for controlling coarse motion of a workpiece table is reduced by reducing the mass of the cable table, so that the control difficulty is reduced.

Description

technical field [0001] The invention relates to a cable table applied to a precision workpiece table, in particular to an actively driven cable table. Background technique [0002] With the continuous improvement of the integration of large-scale integrated circuit devices and the continuous enhancement of lithography resolution, the requirements for the characteristic line width of lithography machines are also constantly increasing. Therefore, the requirements for the speed, acceleration and accuracy of the workpiece table are also increasing. keep improving. [0003] The operation of the workpiece table needs to be equipped with a motor drive system, an air flotation guidance system, a sensor detection system, etc., and a large number of signal lines, power lines, air pipes, water pipes, etc. are required to realize functions such as power supply, air supply, cooling, and control. During the movement of the workpiece table, these cables and pipelines will reciprocate syn...

Claims

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Application Information

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IPC IPC(8): G03F7/20
Inventor 黄剑飞阮冬
Owner SHANGHAI MICRO ELECTRONICS EQUIP (GRP) CO LTD
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