Acousto-optic deflector with phase-controlled transducer array
An acousto-optic deflector and transducer array technology, applied in the field of laser scanning, can solve the problems of high system complexity, poor effect, large tracking error, etc., and achieve the effects of reducing device cost, increasing length, and enhancing practicability
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[0036] The present invention will be further described below in conjunction with the accompanying drawings.
[0037] figure 1 It is a schematic diagram of the structure of the phase-controlled transducer array acousto-optic deflector. In the figure, 1 is the acousto-optic crystal, 2 is the direction of incident light, and 3 is the normal line of the transducer plane. In this example, tellurium dioxide is selected as the acousto-optic material because of its small sound velocity and large acousto-optic figure of merit, which makes it easy to realize a large dynamic scanning angle. Ultrasound is a slow shear wave, and the direction of propagation is basically along the [110] crystal direction of tellurium dioxide, forming an angle with [110] Called the transducer off-axis angle, the incident light forms a small angle θ with the [001] directioni . 4 is a piezoelectric transducer array, the piezoelectric transducer array is welded on the surface of the acousto-optic crystal, 5 ...
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