Silicon substrate nano-structure for solar cell and preparing method thereof

Abstract

The invention discloses a silicon substrate nano-structure for a solar cell and a preparing method thereof, and the method includes: cleaning silicon chips; spin-coating and covering single layer polystyrene (PS) spheres on the surface of the silicon chips; etching the PS spheres and reducing the sizes of the PS spheres; depositing a metal film layer on the surface of the silicon chip surface and forming metal mask; removing residual PS spheres on the silicon chip surface and remaining for the left metal masking layer; forming the silicon substrate nano-structure by using a dry etching or wet etching method; treating the silicon chips by heated concentrated acid and removing the residual metal and finishing the preparation of the silicon substrate nano-structure. According to the silicon substrate nano-structure for the solar cell and the preparing method thereof, PS spheres masking and metal film growth are utilized and the dry etching method and the wet etching method are combined so that a preparing method of silicon substrate nano-structure for the solar cell is provided. According to the silicon substrate nano-structure, the reflectivity is low, the light trapping ability is of high efficient, the light absorption of the solar cell is enhanced and the efficiency of the solar cell is improved.

Description

technical field [0001] The invention relates to the technical field of solar cells, in particular to a silicon-based nanostructure for solar cells and a preparation method thereof. Background technique [0002] In recent years, the environmental problems of energy shortage and global warming have become increasingly serious, and human beings have an unprecedented demand for clean and renewable energy. Photovoltaic solar energy is an important renewable energy source, which has many advantages such as extensive energy sources, less geographical restrictions, and safety and reliability. [0003] Since the first silicon solar cell was applied in 1954, the solar cell has gone through the development of the first generation of monocrystalline silicon solar cell and the second generation of thin film cell, and its technological development trend is to reduce cost and improve efficiency. [0004] At present, the solar cells used in the market are mainly crystalline silicon cells, ...

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Problems solved by technology

[0008] In view of this, the main purpose of the present invention is to provide a silicon-based nanostructure for solar cells and its preparation method, to solve the problem of incident light reflection and transmission loss in solar cells, to reduce reflection and enhance light absorption , for the purpose of obtaining higher battery efficiency

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