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Laser multipoint focusing processing system

A processing system and laser technology, applied in the field of laser multi-point focusing processing systems, can solve the problems of uneven absorption of laser energy, difficult to control thermal stress cracks, and overall material explosion, and achieve a wide processing range, safe and high-quality cutting and separation , the effect of reducing the thermal stress difference

Active Publication Date: 2014-12-10
武汉飞能达激光技术有限公司
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

As a result, it is difficult to control the direction of cracks generated by thermal stress, and transparent and brittle materials are prone to cracks in any direction along the thickness direction, resulting in the overall bursting of the material
Even for thin transparent brittle materials, non-uniform absorption of laser energy through the thickness can lead to loss of control along the desired separation path, especially when cutting curved trajectories with less separation curvature

Method used

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Examples

Experimental program
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Effect test

example 1

[0031] Adopt one of the specific embodiments of the present invention. The laser source in the single-focus laser processing system is a laser with a pulse width of 25ns, a wavelength of 355nm, an output power of 10W, an output spot diameter of 0.8mm, and a focal length of the focusing lens of 50mm. The first total reflection mirror in the multi-focus derivative system is a spherical mirror with a diameter of 60mm, a mirror focal length of 35mm, and a small hole diameter of 1mm; the second is 50×100mm 2 plane mirror. The transparent material to be processed is quartz glass with a thickness of 10mm and an absorption rate of 15% for a wavelength of 355nm. The distance from the first total reflection mirror to the upper surface of the transparent material to be processed is 40 mm, and the distance from the second total reflection mirror to the lower surface of the material is 8 mm. The table moving speed is 1mm per second. Experimental results: The system produces the first la...

example 2

[0033] The second embodiment of the present invention is adopted. The laser source in the single-focus laser processing system is a laser with a pulse width of 100ns, a wavelength of 1064nm, an output power of 50W, an output spot diameter of 2.5mm, and a focal length of the focusing lens of 60mm. The first total reflection mirror in the multi-focus derivative system is an aspheric mirror with a diameter of 60 mm and a focal length of 48.5 mm. The second total reflection mirror is a plane reflection mirror with a width of 50 mm and a length of 400 mm. The distance from the focusing lens to the first total reflection mirror is 23 mm, and the diameter of the aperture of the first total reflection mirror is 2 mm. The thickness of the transparent material to be processed is 100mm, and the absorption rate of the 1064nm wavelength is 5%. The distance from the first total reflection mirror to the upper surface of the transparent material to be processed is 30 mm, and the distance fr...

example 3

[0035] Adopt the third embodiment of the present invention. The laser source in the single-focus laser processing system is a laser with a pulse width of 50ns, a wavelength of 532nm, an output power of 25W, an output spot diameter of 1.5mm, and a focal length of the focusing lens of 70mm. The first total reflection mirror in the multi-focus derivative system is a spherical mirror with a diameter of 60mm and a focal length of 48.5mm, and the diameter of the small hole is 2mm; the second is an aspheric mirror with a focal length of 200mm. The transparent material to be processed is crystal glass with a thickness of 100mm and an absorption rate of 7% for a wavelength of 1064nm. The distance from the first total reflection mirror to the upper surface of the transparent material to be processed is 30 mm, and the distance from the second total reflection mirror to the lower surface of the material is 10 mm. The table moving speed is 1mm per second. Experimental results: the system...

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Abstract

The invention discloses a laser multipoint focusing processing system, wherein the structure of the system is as follows: a laser, a beam expander, a light guide lens, a focusing lens and first and second total reflection mirrors are sequentially located on the same light path, the first total reflection mirror is a spherical mirror or non-spherical mirror processed with a minipore at the middle part, and the curvature radius of the first total reflection mirror is smaller than a half of the minimal distance between the two total reflection mirrors; at work, the concave surface of the first total reflection mirror faces to an xy two-dimensional work table, and the optical axis of the first total reflection mirror is overlapped with the optical axis of the laser; the centre of the minipore is overlapped with the optical axis of the laser; and the position of the focusing lens is adjustable up and down, and the distance between the two total reflection mirrors is adjustable. The system can convert a single focusing point introduced by the laser to a transparent material into a plurality of focusing points with the same optical axis, thereby improving the laser energy absorption uniformity of the cut and separated transparent brittle material along the thickness direction so as to reinforce the heating uniformity of the transparent material along the thickness direction and sharply reduce the stress difference along the thickness direction to cut and separate the transparent brittle material in high quality, high efficiency and high success rate.

Description

technical field [0001] The invention belongs to the technical field of laser processing applications, and in particular relates to a laser multi-point focusing processing system. Background technique [0002] At present, the laser cutting and separation of transparent and brittle materials (such as glass, quartz glass and optical glass, etc.) basically adopts the crack control method. This method uses a focusing lens to focus the laser beam on the surface or somewhere inside the transparent material, and uses the high absorption rate of the transparent material for a certain laser beam (such as a laser beam in the 10.6 μm band) to form a surface that absorbs laser light energy to make the transparent material transparent. Heating the surface of the brittle material; or using the low absorption rate of the transparent brittle material to a certain laser beam (such as the laser beam in the 1.064μm band), let the laser beam penetrate the entire transparent brittle material, for...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): B23K26/046B23K26/38C03B33/08
Inventor 段军邓磊敏曾晓雁
Owner 武汉飞能达激光技术有限公司
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