ZrCN nanometer composite membrane and preparation method thereof

A nano-composite and sputtering technology, applied in ion implantation plating, metal material coating process, coating, etc., can solve the problems of insufficient wear resistance and insufficient hardness, and achieve the effect of excellent friction and wear performance

Inactive Publication Date: 2012-09-12
JIANGSU UNIV OF SCI & TECH
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

The invention overcomes the disadvantages of insufficient hardness and wear resistance of traditional coatings, has high production e

Method used

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  • ZrCN nanometer composite membrane and preparation method thereof
  • ZrCN nanometer composite membrane and preparation method thereof
  • ZrCN nanometer composite membrane and preparation method thereof

Examples

Experimental program
Comparison scheme
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Embodiment 1

[0030] The concrete process parameter of the preparation method of ZrCN composite thin film of the present invention is: Ar gas flow rate is 10sccm, N 2 The air flow is 2 sccm. The sputtering power of the Zr target is 200W, the sputtering power of the C target is 30W, the deposition is 2h, and the film thickness is about 2 microns. The Zr content in the ZrCN composite film thus obtained is 52.2% (atomic fraction, the same below), the C content is 7.1%, the (C+N) / Zr atomic ratio is less than 1, and C enters the ZrN lattice gap to form an interstitial solid solution , the hardness of the film is 29.4GPa, the coefficient of friction is 0.62, and the surface roughness is 31 ?.

Embodiment 2

[0032] The concrete process parameter of the preparation method of ZrCN composite thin film of the present invention is: Ar gas flow rate is 10sccm, N 2 The air flow is 2 sccm. The sputtering power of the Zr target is 200W, the sputtering power of the C target is 60W, the deposition time is 2h, and the film thickness is about 2 microns. The Zr content in the ZrCN composite film thus obtained is 52.4%, the C content is 8%, the (C+N) / Zr atomic ratio is less than 1, C enters the ZrN lattice gap to form a solid solution, and the hardness of the film is 29.7GPa , the coefficient of friction is 0.59, and the surface roughness is 26 ?.

Embodiment 3

[0034] The specific process parameters of the preparation method of the ZrCN composite thin film of the present invention are: the Ar gas flow rate is 10 sccm, and the N2 gas flow rate is 2 sccm. The sputtering power of the Zr target was 200W, the sputtering power of the C target was 90W, the deposition was 2h, and the film thickness was about 2 microns. The Zr content in the resulting ZrCN composite film is 49.4%, the C content is 11.9%, the (C+N) / Zr atomic ratio is less than 1, C enters the ZrN lattice gap to form a solid solution, and the hardness of the film is 33.3GPa , the coefficient of friction is 0.41, and the surface roughness is 14 ?.

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Abstract

The invention discloses a ZrCN nanometer composite membrane which is prepared through a double-target radio-frequency reactive sputtering method and uses stainless steel as a stratum base. The thickness of the ZrCN nanometer composite membrane is 1-3 micrometers, 7.2at.%<=C<=11.9at.%, atomic ratio of (C+N)/Zr is less than 1, C enters ZrN interstitial void to totally form interstitial solid solution, and the hardness of the ZrCN nanometer composite membrane is larger than or equal to 29GPa; or 13.2at.%<=C<=15.4at.%, atomic ratio of (C+N)/Zr is larger than 1, the remaining C (except for the part of C entering the ZrN interstitial void to totally form interstitial solid solution) forms amorphous CN or C elementary substance, and the hardness of the ZrNC nanometer composite membrane is larger than or equal to 18.5GPa.

Description

[0001] technical field [0002] The invention relates to a coating and a preparation method thereof, in particular to a ZrCN nanocomposite film and a preparation method thereof, belonging to the technical field of ceramic coatings. Background technique [0003] The development of modern processing technology, especially the emergence of high-speed cutting, dry cutting and other processes, has put forward higher requirements such as "high speed and high temperature", "high precision", "high reliability" and "long life" for tool coatings. Service requirements. [0004] However, the traditional single coatings such as TiN and CrN are not fully qualified for the service conditions of the tool. Compared with traditional coatings, ZrN coatings have a series of excellent properties such as high chemical and thermal stability, high hardness, low resistivity, good wear resistance, and golden yellow similar to gold. Therefore, in recent years, ZrN coatings research has received inc...

Claims

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Application Information

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IPC IPC(8): C23C14/06C23C14/34C23C14/00
Inventor 喻利花许俊华马冰洋
Owner JIANGSU UNIV OF SCI & TECH
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