Grid optimization method for through silicon via (TSV) positions in automatic layout of three-dimensional (3D) integrated circuit
An integrated circuit, automatic layout technology, applied in electrical digital data processing, special data processing applications, instruments, etc., can solve problems such as chip delay, and achieve the effect of avoiding too dense TSVs
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[0040] A schematic diagram of the structure of a 3D integrated circuit such as figure 1shown. A 3D circuit is a structure in which multi-layer 2D chips are stacked in the vertical direction, and the structural relationship between any two layers of adjacent chips is as follows: figure 1 The top chip 6 and the bottom chip 7, the standard unit 8 in the chip is the basic structure for integrated circuit signal storage and transmission, and the metal interconnection line 9 is connected to the standard unit to complete the interconnection on the layer chip. TSV1 interconnection is used for cross-layer interconnection of standard cells to complete cross-layer transmission of signals. The structure of TSV1 is a via hole passing through two adjacent layers of the 3D integrated circuit chip. .
[0041] The present invention is dedicated to optimizing the layout where the positions of TSVs have been preliminarily determined, so that the spacing of all TSVs meets the process-processin...
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