Cantilever beam frequency detector and detection method based on micromechanical gallium arsenide
A frequency detector, GaAs-based technology, applied in the direction of frequency measurement devices, frequency to amplitude conversion, etc., to achieve the effect of small size, novel structure, and easy integration
Inactive Publication Date: 2014-05-07
SOUTHEAST UNIV
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The existing microwave frequency detection technology is mainly based on the principles of heterodyne method, counting method and resonance method. They have the advantages of high precision and wide frequency band, but their biggest disadvantage is the need for more sophisticated measuring instruments
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[0026] The present invention will be further described below in conjunction with the accompanying drawings.
[0027] see Figure 1-3 , the invention provides a cantilever beam frequency detector based on micromachined gallium arsenide, the frequency detector includes
[0028] Power divider PD, phase shifter PS, low-pass filter F and gallium arsenide metal semiconductor field effect transistor structure,
[0029] The power divider is used to receive the microwave signal on the waiting side, and divide the microwave signal on the waiting side into two branch signals with the same amplitude and phase, that is, the first microwave signal and the second microwave signal, and output them to the arsenic Gallium metal semiconductor field effect transistor structure and phase shifter;
[0030] a phase shifter, configured to receive the second microwave signal, generate a phase shift proportional to the frequency of the signal, and then output the third microwave signal to the GaAs me...
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The invention discloses a cantilever beam frequency detector and a cantilever beam frequency detection method based on micromechanical gallium arsenide. The frequency detector comprises a power divider (PD), a phase shifter (PS), a low pass filter (F) and a gallium arsenide metal semiconductor field effect transistor (MESFET), wherein the PD is used for receiving a microwave signal to be detected and dividing the microwave signal to be detected into two branch signals with the same amplitude and phase. The detection method comprises the following steps that: when a pull-down electrode (8) is loaded with direct current (DC) offset and a cantilever beam (6) is pulled down and contacted with a gate (4), the gate (4) is loaded with the two paths of microwave signals simultaneously, so that the magnitude of saturation current between a source (2) and a drain (3) is changed; and through a capacitor and a filter, the frequency is measured by detecting the magnitude of the saturation current between the source (2) and the drain (3). By the detector and the method, DC power consumption is low, and the frequency is easy to measure.
Description
technical field [0001] The invention proposes a cantilever beam frequency detector based on a micromechanical gallium arsenide base and a preparation method thereof, belonging to the technical field of micro-electromechanical systems (MEMS). Background technique [0002] In the research of microwave technology, frequency, which is one of the three parameters (amplitude, phase and frequency) that characterizes signals, is an important parameter of microwave signals. Microwave signal frequency detection systems are widely used in military, commercial and scientific research. The existing microwave frequency detection technology is mainly based on the principles of heterodyne method, counting method and resonance method. They have the advantages of high precision and wide frequency band, but their biggest disadvantage is the need for more sophisticated measuring instruments. With the development of science and technology, the requirements of modern personal communication syste...
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IPC IPC(8): G01R23/06
Inventor 廖小平易真翔
Owner SOUTHEAST UNIV