Preparation method of high-performance orientation carbon nano tube film electrode
A technology of oriented carbon nanotubes and thin-film electrodes, which is applied in the field of solar cells, can solve the problems of unfavorable, easy agglomeration of random carbon nanotubes, and poor controllability
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[0019] First, the synthesis of aligned carbon nanotube arrays.
[0020] Vertically grown carbon nanotube arrays with Fe(1nm) / Al 2 o 3 (10nm) / SiO 2 / Si as a catalyst was synthesized using typical chemical vapor deposition in a quartz tube of a tube furnace. Al in the catalyst 2 o 3 It is located in the middle of the silicon wafer and Fe, as a buffer layer, and Fe as a catalyst, which are prepared by depositing a nanometer-thick film on the silicon wafer by an electron beam evaporation coating device. Using chemical vapor deposition method, ethylene is used as carbon source, argon and hydrogen are used as carrier gas, and highly oriented carbon nanotube arrays are synthesized on Si substrate with oxide layer. The details of the synthesis can refer to the existing literature reports.
[0021] Second, the preparation of aligned carbon nanotube film electrodes
[0022] Stick the tape on the substrate with a thickness of 100 nm-2 mm, and make it vertically contact with the to...
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