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Method of manufacturing organic electroluminescence display device

一种电致发光显示、制造方法的技术，应用在制造装置领域，能够解决电子注入层电子注入特性劣化、碱金属化合物劣化等问题，达到高清晰度有机EL显示装置的效果

Active Publication Date: 2012-10-17
CANON KK
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

However, the constituent material of the organic compound layer is dissolved in such an organic solvent, and therefore, for example, there arises a problem that in the step of applying a resist, the constituent material of the organic compound layer and the resist are compatible with each other.
[0007] The second problem is that the constituent materials of the electron injection layer and the cathode are required to be water resistant
However, the alkali metal compound is a compound that is water-soluble or its characteristics are deteriorated by water
Therefore, in the method proposed in Japanese Patent No. 4507759, when an alkali metal compound is used as a constituent material of the electron injection layer, there arises a problem in that when the organic compound layer is immersed in water or the like in the photolithography step, the electron injection layer elution
Even if elution does not occur, there arises a problem of deteriorating the electron injection characteristics of the electron injection layer when the organic compound layer is immersed in water or the like

Method used

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  • Method of manufacturing organic electroluminescence display device
  • Method of manufacturing organic electroluminescence display device
  • Method of manufacturing organic electroluminescence display device

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0113] Manufactured according to the manufacturing steps described below image 3 The organic EL display device 3 shown in . It should be noted that, image 3 In the organic EL display device 3 shown in the Figure 1A and 1B In the organic EL display device 1 shown in , the electron blocking layer (17a, 17b or 17c) is provided as an insertion layer between the hole transport layer (12a, 12b or 12c) and the light emitting layer (13a, 13b or 13c). Furthermore, a hole blocking layer (18a, 18b or 18c) is provided as an insertion layer between the light emitting layer (13a, 13b or 13c) and the electron transport layer (14a, 14b or 14c). More specifically, each organic compound layer (2a, 2b, and 2c) is a laminate formed by laminating a hole transport layer, an electron blocking layer, a light emitting layer, a hole blocking layer, and an electron transport layer in the stated order. The basic flow of manufacturing steps and Figure 2A-2I The same as those shown in . Here, a pa...

Embodiment 2

[0147] An organic EL display device was produced in the same manner as in Example 1, except that the step of removing the mask layer was also performed in the closed space. Figure 5 It is a schematic diagram showing a part of the organic EL display device used in this example (Example 2). Figure 5 The device 40 shown in includes, with Figure 4 The device 30 shown in the same, the loading room 41, the drying room 42, the first film forming room 43, the second film forming room 44, the packaging operation room 45 and the transfer room 46, in addition, also includes a mask for removing The water washing treatment chamber 47 and the water dissipating chamber (water dissipating chamber) 48 of the step of the first floor are connected to the carrying-in chamber 41 . More specifically, Figure 5 The apparatus 40 shown in includes a plurality of chambers including a water washing treatment chamber 47 , a water dissipation chamber 48 and an intake chamber 41 connected in the order...

Embodiment 3

[0150] An organic EL display device was manufactured in the same manner as in Example 1 except that the step of forming the mask layer and the step of removing the mask layer were changed to the steps described below. This embodiment is as follows.

[0151] (A) Steps up to the step of forming a mask layer

[0152] An organic compound layer was formed on the substrate 10 in the same manner as in Example 1. It should be noted that, in the present embodiment, the electron transport layer 14 was formed to have a thickness of 50 nm.

[0153] (B) Step of forming mask layer

[0154] Next, a thin film of silicon nitride is formed on the organic compound layer to become the mask layer 20 .

[0155] (C) Step of forming mask layer

[0156] Next, by using CF 4 Gas dry etching processes the thin film to be the mask layer 20 to form the mask layer 20 . It should be noted that during dry etching, CF 4 The gas etches a portion of the electron transport layer 14, which may damage the el...

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Abstract

An organic electroluminescence display device includes an organic compound layer which is placed between a pair of electrodes and includes at least an emission layer, the organic compound layer being two-dimensionally arranged. A method of manufacturing the organic electroluminescence display device includes forming the organic compound layer which is insoluble in water in an entire emission region on a substrate, providing a mask layer containing a water-soluble material in at least a part of a region on the organic compound layer, removing a part of the organic compound layer which is provided in a region which is other than the region in which the mask layer is provided, removing the mask layer, and forming, after the removing of the mask layer, a layer containing at least an alkali metal or an alkaline-earth metal in a region including at least the emission region.

Description

technical field [0001] The present invention relates to a manufacturing method of an organic electroluminescent (EL) display device and a manufacturing apparatus for performing the manufacturing method. Background technique [0002] A generally known display device on which an organic EL element is mounted is a device in which pixels each having a single or a plurality of organic EL elements are arranged in a predetermined pattern. These pixels divide the light emitting area of ​​the display device two-dimensionally and finely. An organic EL element included in a pixel is an electronic element that outputs any of, for example, red light, green light, and blue light. A display device on which an organic EL element is mounted obtains a full-color image by driving the organic EL element for outputting a desired color with a desired emission intensity. [0003] Incidentally, in an organic EL element as a component of a display device, an organic compound layer as a component o...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): H01L27/32H10K99/00
CPCH01L51/0017H01L51/56H01L51/0014H10K71/20H10K71/231H10K71/441H10K71/166H10K71/00
Inventor 广木知之远藤太郎高谷格石毛刚一佐藤信彦
Owner CANON KK