Moisture-sensitive sensor based on potassium tantalite sensitive membrane and preparation method thereof

A humidity sensor, potassium tantalate technology, applied in the direction of material impedance, etc., to achieve the effects of low cost, good detection performance, and simple process

Inactive Publication Date: 2013-01-02
JILIN UNIV
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Method used

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  • Moisture-sensitive sensor based on potassium tantalite sensitive membrane and preparation method thereof
  • Moisture-sensitive sensor based on potassium tantalite sensitive membrane and preparation method thereof
  • Moisture-sensitive sensor based on potassium tantalite sensitive membrane and preparation method thereof

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0033] First, wipe the ceramic substrate with acetone and ethanol cotton balls until it is clean, then place the substrate in acetone, ethanol and deionized water in sequence, ultrasonically clean it for 5 minutes, and finally dry it at 100°C for later use;

[0034] Au metal interdigitated electrodes were prepared by screen printing technology. According to the mass ratio of ink (Jiahua JX07500487): Au powder: diluent (ethanol: ethyl acetate = 1.5:1), the mass ratio was 1:1.5:3, and stirred Prepare a paste; then inject the paste on the screen plate with the interdigitated electrode pattern, scrape the paste with an inclination angle of 30 degrees and a pressure of 5 N, print the electrode and dry it, and then use ultraviolet light After curing for 400s, metal interdigitated electrodes were prepared.

[0035] Preparation of potassium tantalate by hydrothermal method: Dissolve 4 g of potassium hydroxide in 10 mL of water at room temperature, stir the solution until it becomes cl...

Embodiment 2

[0039] First, wipe the substrate with acetone and ethanol cotton balls until it is clean, then place the substrate in acetone, ethanol and deionized water in sequence, ultrasonically clean it for 5 minutes, and finally dry it at 100°C for later use;

[0040] The preparation process of the Au metal interdigitated electrode is the same as that in Example 1.

[0041] Potassium tantalate was prepared by hydrothermal method: the experimental process was the same as in Example 1.

[0042] Put the dried potassium tantalate into a mortar and grind for 30 minutes; then drop deionized water into the mortar, and continue grinding for 30 minutes, so that the deionized water and materials are fully mixed to form a viscous slurry. . Dip a small amount of the sensitive film slurry with a spatula, coat it on the substrate, the number of coatings is 2 times, and then dry it at 60°C to obtain an element with a sensitive film thickness of 3 μm. Place the element prepared above in a humidity so...

Embodiment 3

[0045] First, wipe the substrate with acetone and ethanol cotton balls until it is clean, then place the substrate in acetone, ethanol and deionized water in sequence, ultrasonically clean it for 5 minutes, and finally dry it at 100°C for later use;

[0046] The preparation process of the Au metal interdigitated electrode is the same as that in Example 1.

[0047] Potassium tantalate was prepared by hydrothermal method: the experimental process was the same as in Example 1.

[0048] Put the dried potassium tantalate into a mortar and grind for 30 minutes; then drop deionized water into the mortar, and continue grinding for 30 minutes, so that the deionized water and materials are fully mixed to form a viscous slurry. . Dip a small amount of the sensitive film slurry with a spatula, coat it on the substrate for 3 times, and then dry it at 60°C to obtain an element with a sensitive film thickness of 4 μm. Place the element prepared above in a humidity source with a relative hu...

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Abstract

The invention belongs to the technical field of a moisture sensitive device, and in particular relates to a moisture-sensitive sensor based on a potassium tantalite sensitive membrane and a preparation method thereof. The sensor consists of a ceramic substrate, a gold (Au) metal interdigital electrode and a potassium tantalite sensitive membrane, wherein the Au metal interdigital electrode is prepared on the ceramic substrate by adopting a silk screen printing method, the potassium tantalite sensitive membrane is prepared on the Au metal interdigital electrode by adopting a coating method, the thickness of the potassium tantalite sensitive membrane is 2 to 4 micrometers, and both the width and the interval space of the metal interdigital electrode is 0.15 to 0.20mm. The preparation method comprises following steps of firstly adopting the silk screen printing method to prepare the Au metal interdigital electrode on the ceramic substrate, adopting a hydrothermal method to prepare a potassium tantalite sensitive material, adopting a coating method to coat the potassium tantalite sensitive material onto the metal interdigital electrode to prepare a moisture-sensitive element. The potassium tantalite moisture-sensitive sensor is simple in preparation process, small in size, applicable to mass production, high in sensitivity to the moisture, small in hysteresis, fast in responding time and vast in application value on the aspect of the moisture sensitive detection aspect.

Description

technical field [0001] The invention belongs to the technical field of humidity-sensitive devices, and in particular relates to a humidity-sensitive sensor with potassium tantalate as a sensitive film and a preparation method thereof. Background technique [0002] Humidity is closely related to people's life, industrial production, scientific research, national defense construction, and the growth of animals and plants. In human life, if the air is too humid, it will make people feel dull, and if the air is too dry, it will make people's skin feel uncomfortable. Therefore, instruments should be used to detect and control the humidity in the room; in industrial production, the humidity Control is directly related to the quality of products; in terms of national defense, the storage of aerospace missiles and military instruments is inseparable from the control of humidity, so the detection of humidity in military warehouses is essential; Humidity detection is also inseparable...

Claims

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Application Information

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IPC IPC(8): G01N27/02
Inventor 阮圣平张莹刘彩霞沈亮郭文滨董玮周敬然温善鹏张歆东陈维友
Owner JILIN UNIV
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