Biochip with constant volume and preparation method thereof
A technology of biochip and fixed capacity, which is applied in biological testing, gaseous chemical plating, material inspection products, etc., and can solve the problems of inaccurate biochip detection results and complicated preparation methods
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specific Embodiment approach 1
[0014] Specific embodiment one: in this embodiment, a biochip with a fixed capacity is made of a porous silicon layer 1, an epoxy resin layer 2 and a glass substrate 3; wherein the porous silicon layer is made of a silicon dioxide layer 1 -2, silicon nitride layer 1-3 and single crystal silicon layer 1-1, silicon dioxide layer 1-2 is located between silicon nitride layer 1-3 and single crystal silicon layer 1-1, single crystal silicon layer 1-1 and the glass substrate 3 are bonded together through the epoxy resin layer 2; the hole on the silicon wafer layer 1 with holes is the reaction zone 4.
[0015] This embodiment utilizes the anisotropy of single crystal silicon in potassium hydroxide solution etching. The so-called anisotropy from the perspective of crystal structure means that the periodicity and density of atomic arrangement of crystals along different directions are not the same, which leads to different physical and chemical properties of crystals in different direct...
specific Embodiment approach 2
[0016] Embodiment 2: This embodiment is different from Embodiment 1 in that: the glass substrate 3 is a transparent glass sheet. Others are the same as in the first embodiment.
specific Embodiment approach 3
[0017] Embodiment 3: This embodiment differs from Embodiment 1 or Embodiment 2 in that: the reaction zones 4 are distributed in an array on the biochip. Others are the same as in the first or second embodiment.
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Abstract
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