Method for producing high-sensitivity surface reinforcement Raman sensor chip

Abstract

The invention discloses a method for producing a high-sensitivity surface reinforcement Raman sensor chip. The method comprises the following steps: (1) carrying out hydrophilic treatment on a substrate; (2) selecting uniform medium nanosphere latex solution, and a self-assembling a single layer of densely arranged medium nanosphere array on the substrate subjected to the hydrophilic treatment by using a spin coating method or a puling method; (3) utilizing a reactive ion etching technology to etch the medium nanosphere array which is obtained in the step 2; and (4) coating a metal film on the etched medium nanosphere array which is obtained in the step 3, thus obtaining the high-sensitivity surface reinforcement Raman sensor chip, wherein the thickness of the coating film is smaller than the etching thickness in the step 3,. The method is used for solving the contradiction among repeatability, uniformity and sensitivity of the conventional surface reinforcement Raman sensor chips which are produced through a physical etching method and a chemical synthesizing method, and the produced surface reinforcement Raman sensor chip has high sensitivity and good repeatability and uniformity.

Description

technical field [0001] The invention relates to a preparation technology of an optical sensing chip, in particular to a method for manufacturing a highly sensitive surface-enhanced Raman sensing chip. Background technique [0002] The Raman spectrum of a substance is a kind of fingerprint characteristic spectrum, so it has strong specificity and can detect substances without labels and in real time. However, the Raman scattering signal of the material is very weak, several orders of magnitude lower than the incident light, so the sensitivity is low. The local enhancement characteristics of the nano-metal structure can enhance the electromagnetic field on the surface of the metal structure by several orders of magnitude, and correspondingly greatly increase the Raman signal, which is called surface-enhanced Raman scattering. [0003] People have studied the preparation methods of surface-enhanced Raman scattering enhanced structures through various methods. At present, they...

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Problems solved by technology

[0004] In view of this, the present invention provides a highly sensitive surface-enhanced Raman sensor chip manufacturing method to solve the repeatability and uniformity of the chip obtained by the existing surface-enhanced Raman sensor chip physical lithography and chemical synthesis preparation methods The incompatibility between sensitivity and sensitivity, the preparation of surface-enhanced Raman chips with high sensitivity, good repeatability and uniformity

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