Bonding method for improving bonding force and optical properties of bonding crystal

A technology of optical properties and bonding force, applied in chemical instruments and methods, crystal growth, post-processing details, etc., can solve problems such as small bonding force, large optical loss, and increase the bonding force of gallium arsenide diffusion bonded crystals, etc., to achieve Effect of eliminating surface oxide and improving optical performance
CN102912449AInactive Publication Date: 2013-02-06BEIJING UNIV OF TECH
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Patent Information

Authority / Receiving Office
CN · China
Patent Type
Applications(China)
Current Assignee / Owner
BEIJING UNIV OF TECH
Publication Date
2013-02-06
Estimated Expiration
Not applicable · inactive patent

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Abstract

The invention relates to a bonding method for improving the bonding force and the optical properties of a bonding crystal, which can be applied to preparing a quasi-phase-matched nonlinear crystal, belongs to the field of nonlinear optical crystals and mainly solves the problems that the quasi-phase-matched crystal obtained through conventional bonding is large in optical loss and small in bonding force. According to the bonding method, a gallium arsenide crystal is selected as a bonding material, ultrahigh vacuum ion source cleaning equipment is utilized, and the loss of a bonding interface is reduced and the bonding force of the bonding crystal is improved by solution cleaning, ion cleaning, ultrahigh vacuum low-temperature bonding, low-pressure heat treatment and other technologies. The bonding method for improving the bonding force and the optical properties of the bonding crystal is mainly used for preparing the quasi-phase-matched gallium arsenide crystal with nonlinear frequency conversion in an infrared band.
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Description

technical field

[0001] The invention relates to a bonding method for improving the bonding force and optical properties of bonded crystals, which can be used to prepare quasi-phase-matched nonlinear crystals and belongs to the field of nonlinear optical crystals. Background technique

[0002] Wafer bonding technology is to clean and activate two homogeneous or heterogeneous materials with clean surface and atomic level roughness, without using any adhesive substances, and directly bond them into one under certain conditions. Forces, molecular forces, and even atomic forces combine together. Wafer bonding technology has great advantages. The interface obtained by this technology has the advantages of firmness, smoothness and optical transparency. This interface is of great significance for the innovation of optical devices. Quasi-phase matching is an effective optical nonlinear frequency conversion method developed in recent years. The polarization direction inside the quasi...

Claims

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