Manufacturing method for nanowire single-photon detector based on specially doped superconducting niobium film material
A single-photon detector and thin-film material technology, which is applied in semiconductor devices, metal material coating technology, ion implantation plating, etc., can solve the problems of low superconducting transition temperature, small critical current density, and short photoresponse wavelength. The effect of achieving a high critical current density
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[0029] Below in conjunction with accompanying drawing and specific embodiment, further illustrate the present invention, should be understood that these embodiments are only for illustrating the present invention and are not intended to limit the scope of the present invention, after having read the present invention, those skilled in the art will understand various aspects of the present invention Modifications in equivalent forms all fall within the scope defined by the appended claims of this application.
[0030] Concrete micromachining manufacturing steps of the present invention are:
[0031] 1. First put the double-sided polished MgO substrate (referred to as "substrate") into the acetone solution for ultrasonic cleaning for 3 to 5 minutes, then put the substrate into the alcohol solution for ultrasonic cleaning for 3 to 5 minutes, and finally use deionized Ultrasonic cleaning with water for 3 to 5 minutes, drying the substrate with nitrogen gas, checking the cleanlines...
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