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Method for making square aperture plane micro-lens array with high filling coefficient

A technology of microlens array and filling factor, which is applied in lens, optics, instruments, etc., can solve the problems of long ion exchange time and low ion mobility, etc.

Inactive Publication Date: 2013-04-10
SOUTHWEST UNIV
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  • Abstract
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Problems solved by technology

However, due to the small mobility of ions, if the ion exchange depth is too large, the ion exchange time will be very long, which is not ideal in the experiment

Method used

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  • Method for making square aperture plane micro-lens array with high filling coefficient
  • Method for making square aperture plane micro-lens array with high filling coefficient
  • Method for making square aperture plane micro-lens array with high filling coefficient

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Embodiment Construction

[0054] The present invention will be further described below in conjunction with specific embodiments and accompanying drawings.

[0055] Such as Figure 11 As shown, the description of each step is as follows:

[0056] (a) is coating a titanium film on a glass substrate, (b) is uniformly coating photoresist, (c) is exposing (ultraviolet light), (d) is developing, (e) is removing titanium film from a window, (f) For photoresist removal, (g) for ion exchange.

[0057] The specific implementation process is as follows,

[0058] (1) Template preparation: design the size of the template, and then make the template;

[0059] Experiments have proved that even if the ion exchange time of the circular window array is very long, there will always be unexchanged areas between the nearest neighbor windows, and it is difficult to achieve a high fill factor. Therefore, to make a planar microlens array with a high filling factor, square windows and their corresponding arrangements can b...

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Abstract

The invention provides a method for making a square aperture plane micro-lens array with a high filling coefficient. The method comprises the following steps of: selecting a piece of optical glass with high Na+ content as a base plate, washing the surface of the base plate, and then sputtering a titanium membrane layer on the glass base plate; uniformly coating photoresist on the titanium membrane layer; exposing with ultraviolet rays to develop an image; removing the titanium membrane layer and the photoresist; and carrying out ion exchange. The method is characterized in that a square mask plate with a square hole is used during exposure, wherein the four sides of the square hole are parallel with or perpendicular to the four sides of a square formed by the central connecting lines of adjacent four holes. The filling factor of the square aperture plane micro-lens array is higher than that of a previously developed round dispersion array, so that the square aperture plane micro-lens array can be used in the convergence, reshaping, coupling, interconnection and imaging conditions of optical information and in conditions with requirements on the most possible full utilization of the optical information in a nondestructive way, which is more important than the improvement on the image quality of transmitted images. The method provided by the invention has extremely important theoretical significance and practical significance.

Description

technical field [0001] The invention relates to a manufacturing method of a plane microlens array. Background technique [0002] The variable refractive index planar microlens array is one of the important tiny optical elements with the characteristics of miniaturization, arraying, and integration. Because the metalens are buried in the glass substrate, they have a strong ability to resist temperature changes and external stress, and have important scientific research value and broad application prospects, such as optical fiber sensing systems, optical information processing systems, multi-aperture optical systems, etc. In the field of practical application, it is a key component of coupler array, connector array, optical splitter array, etc. [0003] Most of the microlens arrays made in the past are cylindrical or hemispherical, but the arrangement of the circular holes makes the filling factor small (the filling factor is defined as the ratio of the effective light-receiv...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G02B3/00
Inventor 周素梅蒋小平
Owner SOUTHWEST UNIV
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