Getter

A technology of getter and sintering aid, which is applied in other chemical processes, separation of dispersed particles, chemical instruments and methods, etc., can solve the problems of powder drop, sharp drop of inhalation rate, and high activation temperature of getter

Inactive Publication Date: 2013-04-24
BEIJING LIANCHUANG HONGYE VACUUM TECH
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

The getter activation temperature of these getters is relatively high and single, and the temperature range is 500~900°C, which has certain limitations for the use of high-precision microelectronic devices; the getter activated by high temperature has a sharp drop in the getter rate In some cases, it is impossible to mai...

Method used

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preparation example Construction

[0042] The present invention has no special limitation on the preparation method of the getter, preferably prepared according to the following method:

[0043] Provide ternary alloy particles;

[0044] The ternary alloy particles, the second getter particles and the sintering aid are mixed and pressed to form a green body, and the material of the second getter particles is a metal element or a metal compound of the fourth subgroup;

[0045] The green body is sintered to obtain the getter.

[0046] The present invention provides ternary alloy particles. The present invention has no special restrictions on the preparation method of the ternary alloy particles, and the ternary alloy particles are preferably prepared by the method described in the above technical solution;

[0047] After the ternary alloy particles are obtained, the present invention mixes the ternary alloy particles with the second getter particles and sintering aid described in the above technical solution to o...

Embodiment 1

[0055] Use vacuum electric arc furnace to smelt Zr-V-Mn alloy, wherein the mass fraction of Zr is 80%, the mass fraction of V is 10%, the mass fraction of Mn is 10%, the Zr-V-Mn that will obtain under argon protection The alloy is crushed until the particle diameter is 50 μm ~ 100 μm, and the obtained Zr-V-Mn alloy particles with a particle size of 50 μm ~ 100 μm, Ti powder with a particle size of 50 μm ~ 100 μm and Mo powder with a particle size of 50 μm ~ 100 μm According to the mass ratio of 4.5:4.5:1, the mixture was mixed for 4 hours, and the obtained mixture was pressed and molded, and then put into a vacuum sintering furnace for sintering. The sintering temperature was 670° C. and the sintering time was 10 minutes to obtain the getter.

[0056] The structure of the getter obtained by the detection of the present invention shows that the getter obtained in this embodiment presents a porous structure;

Embodiment 2

[0059] Use vacuum electric arc furnace to smelt Zr-V-Mn alloy, wherein the mass fraction of Zr is 60%, the mass fraction of V is 35%, the mass fraction of Mn is 5%, the Zr-V-Mn that will obtain under argon protection The alloy is crushed until the particle diameter is 50 μm to 100 μm, and the obtained Zr-V-Mn alloy particles are mixed with Ti powder with a particle size of 50 μm to 80 μm and sintering aid Nb powder with a particle size of 50 μm to 80 μm in a mass ratio of 4:5 : 1 ratio batching, mixing for 5 hours, the obtained mixture was pressed into shape, then put into a vacuum sintering furnace for sintering, the sintering temperature was 770°C, and the sintering time was 15min to obtain the getter.

[0060] The structure of the getter obtained by the detection of the present invention shows that the getter obtained in this embodiment presents a porous structure;

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Abstract

The invention provides a getter which comprises the following components in percentage by weight: 15-70 percent of first air suction particles, 15-70 percent of second air suction particles and 5-15 percent of a sintering aid, wherein the first air suction particles refer to a ternary alloy; two metals in the ternary alloy refer to Zr and V; and the second air suction particles are metal simple substances or metal compounds in the fourth subgroup. The hydrogen atom has high diffusion rate in a V-enriched phase of the ternary alloy, and the ternary alloy has low activation temperature; the second air suction particles have high hydrogen absorption capacity, stable air suction performance and high air suction rate; and moreover, a beta-phase solid solution is formed between the sintering aid and the second air suction particles, so that the binding force among the getter particles is increased, and the stability of the getter is improved. Therefore, the getter has the wide-range activation performance and has high firmness and air suction performance.

Description

technical field [0001] The invention relates to the technical field of getter equipment, in particular to a getter. Background technique [0002] Getters, also known as getters, are used to obtain, maintain vacuum and purify gases, etc., and can effectively absorb certain gas molecules. There are powder, disc, ribbon, tube, ring, cup shape and many other shapes. [0003] The getter can react or adsorb with active gas molecules through physical or chemical action, so as to effectively increase the vacuum degree in the device. Getters are widely used in vacuum electronic devices, creating a good working environment for the devices, stabilizing the characteristic parameters of the devices, and having an important impact on the performance and service life of the devices: First, the getters can improve the vacuum in a short time. device vacuum (up to 10 -4 Pa or above), the elimination of residual and re-released gases after the exhaust of the device is sealed off and during ...

Claims

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Application Information

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IPC IPC(8): B01J20/06B01D53/02
Inventor 张红
Owner BEIJING LIANCHUANG HONGYE VACUUM TECH
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