Nondestructive testing method for optical glass polishing sub-surface damages

A subsurface damage, optical glass technology, applied in the direction of material analysis, measuring device, scientific instrument, etc. by optical means, to achieve the effect of flexible and controllable detection area, high detection efficiency, and fast detection process

Inactive Publication Date: 2013-05-22
NAT UNIV OF DEFENSE TECH
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

However, how to improve the detection accuracy of the quasi-polarization angle technology for amorphous optical materials, especially how to use the quasi-polari

Method used

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  • Nondestructive testing method for optical glass polishing sub-surface damages
  • Nondestructive testing method for optical glass polishing sub-surface damages
  • Nondestructive testing method for optical glass polishing sub-surface damages

Examples

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Example Embodiment

[0037] Example 1:

[0038] Kind of like figure 1 The shown non-destructive detection method for optical glass polishing sub-surface damage of the present invention includes the following steps:

[0039] (1) Preparation of non-destructive substrate: select the quartz glass sample of Φ20mm×5mm that has been traditionally polished by cerium oxide as the glass sample to be tested; first use the magnetorheological polishing process to polish the glass sample to be tested, using the ρ-θ method, magnetorheological Liquid viscosity 350×10 -3 Pa·s, using PF-1-1 cerium oxide polishing powder, current intensity 5A, polishing wheel speed 60r / min, flow rate 2L / min, magnetorheological polishing time 12h, the surface is rough after magnetorheological polishing measured by atomic force microscope The degree of Ra value is 0.359373nm; at 12℃, 5% hydrofluoric acid is used to etch the sample after magnetorheological polishing for 3min, and the etching depth is 59.6nm, which can effectively remove the...

Example Embodiment

[0050] Example 2:

[0051] Kind of like figure 1 The shown non-destructive detection method for optical glass polishing sub-surface damage of the present invention includes the following steps:

[0052] (1)Preparation of non-destructive substrate: select Φ20mm×5mm and roughen polished by magnetorheological fluid (using x-y scanning method, magnetorheological fluid viscosity 350×10 -3 Pa·s, use PF-1-1 cerium oxide polishing powder, current intensity 6A, polishing wheel speed 80r / min, flow rate 31 / min, polishing time 2h) as the glass sample to be tested; use magnetorheological fluid first The polishing process is used to polish the glass sample to be tested. The specific polishing parameters are the same as in Example 1. The surface roughness Ra value measured by atomic force microscope is 0.370702nm; at 24℃, 5% hydrofluoric acid is used to etch after magnetorheological polishing. The sample is 3 minutes, and the etching depth is 71nm, which can effectively remove the sub-surface mec...

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Abstract

The invention discloses a non-destructive testing method for optical glass polishing sub-surface damages. The method comprises the following steps of: preparing a non-destructive base at first, and then determining an incident angle for ellipsometry detection; calculating the optical constant of the non-destructive base according to ellipsometry parameters measured with the incident angle for ellipsometry detection, wherein the non-destructive base is defined as a substrate-environment structure, and a standard dielectric function is taken as a material physical model; defining a sub-surface damage surface of a sample as a multi-film optical model which comprises air, a coarse surface layer, a resedimentation layer and a substrate; building a multi-film material physical model through a mixed material effective medium model based on the multi-film optical model, and measuring the surface roughness and the depth distribution rule of surface sedimentation substances of the sample by virtue of the optical constant of the non-destructive base; and finally, carrying out inverse operation by a regression algorithm according to the ellipsometry parameters of the sample measured with the incident angle for ellipsometry detection, thus obtaining the depth of the sub-surface damage layer. The testing method is accurate, reliable, quick, efficient, flexible and controllable.

Description

technical field [0001] The invention relates to a method for detecting damage on the surface of an optical element, in particular to a method for detecting damage depth on an optical glass polished subsurface Background technique [0002] The existence of subsurface damage directly reduces important performance indicators such as the service life, long-term stability, coating quality, imaging quality, and laser damage threshold of optical components, especially polished subsurface damage such as redeposited impurities, plastic scratches, and microcracks. It will cause fatal damage to optical components in the environment of strong laser and high energy concentration. The characteristic scales of the above-mentioned polished subsurface damage are small (the plastic scratches are at the nanometer scale, and the concentration of polishing impurities is at the ppm level), and the forms are diverse, and the mutual coupling is difficult to distinguish effectively (the redeposited ...

Claims

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Application Information

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IPC IPC(8): G01N21/958
Inventor 王卓杨军宏曹玉君徐小军尚建忠戴一帆李圣怡
Owner NAT UNIV OF DEFENSE TECH
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