Nondestructive testing method for optical glass polishing sub-surface damages
A subsurface damage, optical glass technology, applied in the direction of material analysis, measuring device, scientific instrument, etc. by optical means, to achieve the effect of flexible and controllable detection area, high detection efficiency, and fast detection process
- Summary
- Abstract
- Description
- Claims
- Application Information
AI Technical Summary
Problems solved by technology
Method used
Image
Examples
Example Embodiment
[0037] Example 1:
[0038] Kind of like figure 1 The shown non-destructive detection method for optical glass polishing sub-surface damage of the present invention includes the following steps:
[0039] (1) Preparation of non-destructive substrate: select the quartz glass sample of Φ20mm×5mm that has been traditionally polished by cerium oxide as the glass sample to be tested; first use the magnetorheological polishing process to polish the glass sample to be tested, using the ρ-θ method, magnetorheological Liquid viscosity 350×10 -3 Pa·s, using PF-1-1 cerium oxide polishing powder, current intensity 5A, polishing wheel speed 60r / min, flow rate 2L / min, magnetorheological polishing time 12h, the surface is rough after magnetorheological polishing measured by atomic force microscope The degree of Ra value is 0.359373nm; at 12℃, 5% hydrofluoric acid is used to etch the sample after magnetorheological polishing for 3min, and the etching depth is 59.6nm, which can effectively remove the...
Example Embodiment
[0050] Example 2:
[0051] Kind of like figure 1 The shown non-destructive detection method for optical glass polishing sub-surface damage of the present invention includes the following steps:
[0052] (1)Preparation of non-destructive substrate: select Φ20mm×5mm and roughen polished by magnetorheological fluid (using x-y scanning method, magnetorheological fluid viscosity 350×10 -3 Pa·s, use PF-1-1 cerium oxide polishing powder, current intensity 6A, polishing wheel speed 80r / min, flow rate 31 / min, polishing time 2h) as the glass sample to be tested; use magnetorheological fluid first The polishing process is used to polish the glass sample to be tested. The specific polishing parameters are the same as in Example 1. The surface roughness Ra value measured by atomic force microscope is 0.370702nm; at 24℃, 5% hydrofluoric acid is used to etch after magnetorheological polishing. The sample is 3 minutes, and the etching depth is 71nm, which can effectively remove the sub-surface mec...
PUM
Property | Measurement | Unit |
Surface roughness | aaaaa | aaaaa |
Depth | aaaaa | aaaaa |
Surface roughness | aaaaa | aaaaa |
Abstract
Description
Claims
Application Information

- R&D Engineer
- R&D Manager
- IP Professional
- Industry Leading Data Capabilities
- Powerful AI technology
- Patent DNA Extraction
Browse by: Latest US Patents, China's latest patents, Technical Efficacy Thesaurus, Application Domain, Technology Topic.
© 2023 PatSnap. All rights reserved.Legal|Privacy policy|Modern Slavery Act Transparency Statement|Sitemap