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Quartz vibration beam accelerometer and manufacture method thereof

A technology of an accelerometer and a manufacturing method, which are applied in the directions of measuring acceleration, velocity/acceleration/impact measurement, and manufacturing microstructure devices, etc., can solve the problems of low accelerometer accuracy, unsatisfactory assembly effect, and high production cost, and achieve machining accuracy. High, high assembly precision, good repeatability

Active Publication Date: 2013-05-22
SOUTHEAST UNIV
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  • Abstract
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  • Application Information

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Problems solved by technology

The current split beam accelerometers are mainly assembled by glue bonding, which requires high requirements for the assembly machine and personnel, so the assembly effect is not ideal, for example, the accuracy of the accelerometer is not high, the yield rate is low, and the production cost is high.

Method used

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  • Quartz vibration beam accelerometer and manufacture method thereof
  • Quartz vibration beam accelerometer and manufacture method thereof
  • Quartz vibration beam accelerometer and manufacture method thereof

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Embodiment Construction

[0015] Such as figure 1 As shown, the quartz vibrating beam accelerometer of the present invention is composed of a quartz vibrating beam 1 and a mass-flexible structure 2, wherein the mass-flexible structure 2 is an integrated structure composed of a base 4, a flexible hinge 3 and a mass 5 , the quartz vibrating beam 1 and the mass-flexible structure 2 are assembled via bonding of a metal alloy material 10 . The quartz vibrating beam and the mass-flexible structure are made of quartz wafers of different thicknesses respectively, and the vibrating beam is made of a small-thickness quartz chip to improve the force-frequency effect of the vibrating beam; the mass-flexible structure is made of a thick quartz chip, To obtain a large enough mass, generate a large inertial force, and then provide a large enough axial force to the vibration beam structure through the deformation of the flexible structure; the thickness of the mass block is the same as the thickness of the base, and t...

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Abstract

The invention discloses a quartz vibration beam accelerometer and a manufacture method thereof. The quartz vibration beam accelerometer comprises a quartz vibration beam and a quality-flexible structure, wherein the quality-flexible structure comprises a base and a quality block, the base is connected with the quality block through a flexible hinge, pads are respectively arranged on two ends of the quartz vibration beam, the base and the quality block, assembly between the pads on the corresponding positions is in a bonding mode through metal alloy, and an exciting electrode is connected on a pad corresponding to the base. The manufacture method for the quartz vibration beam accelerometer comprises a photoetching technique, wet etching micro processing technology manufacturing and a reflow soldering technology. The quartz vibration beam accelerometer and the manufacture method thereof have the advantages that the quartz vibration beam accelerometer is high in processing precision, good in corresponding relation of the position and the size of the pads, meanwhile, high in assembly precision, good in repeatability, and simple in assembly technique.

Description

technical field [0001] The invention relates to an accelerometer and a manufacturing method thereof, in particular to a quartz vibrating beam accelerometer and a manufacturing method thereof. Background technique [0002] Quartz vibrating beam accelerometer technology has been an important development direction of inertial navigation instruments since its inception, and has attracted widespread attention from all over the world. It uses the force-sensitive quartz vibrating beam as a sensitive element, can directly output digital signal (frequency), and avoids the speed incremental error introduced by A / D conversion. It has outstanding advantages in terms of cost, volume, power consumption, weight, and accuracy, and has broad application prospects in medium and high-precision fields such as military industry, satellite, and exploration. Its working principle is to convert the measured acceleration into inertial force through the mass block and act on the axial direction of t...

Claims

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Application Information

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IPC IPC(8): G01P15/097B81C1/00B81B3/00
Inventor 梁金星张俪园崔粟晋孟广婵
Owner SOUTHEAST UNIV
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