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Preparation method of ceramic substrate

A ceramic substrate and ceramic membrane technology, which is applied in the direction of ceramic layered products, chemical instruments and methods, layered products, etc., can solve the problems of increased manufacturing defect rate, substrate warping, and processing inability, etc.

Active Publication Date: 2014-09-17
GUANGDONG FENGHUA ADVANCED TECH HLDG
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

The shrinkage stress during the sintering process can easily warp very thin substrates (0.1 mm to 0.3 mm in thickness), resulting in failure of subsequent processing (such as electrode coating, secondary division, etc.) and increased manufacturing defect rate

Method used

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  • Preparation method of ceramic substrate
  • Preparation method of ceramic substrate

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preparation example Construction

[0023] Such as figure 1 Shown, the preparation method of the ceramic substrate of one embodiment, comprises the following steps:

[0024] S10, uniformly mixing the ceramic powder, the first organic binder and the first solvent to obtain a ceramic slurry, then preparing a ceramic film by using the ceramic slurry as a raw material, and finally preparing a ceramic substrate green body by using the ceramic film as a raw material.

[0025] The mass ratio of the ceramic powder, the first organic binder and the first solvent may be 100:30˜45:50˜70.

[0026] The ceramic powder can be Class I porcelain, Class II porcelain or Class III porcelain. Class I ceramics can be C0G characteristic ceramics, etc. Class Ⅱ ceramics can be X7R characteristic ceramics, etc. Class III ceramics can be Z5U characteristic ceramics, etc.

[0027] The first organic binder may be polyvinyl butyral or the like.

[0028] The first solvent may be a mixture of toluene and ethanol, and the mass ratio of tol...

Embodiment 1

[0058] According to the mass ratio of 100:45:70, the C0G characteristic ceramic powder, polyvinyl butyral and a mixture of toluene and ethanol with a mass ratio of 1:1 were mixed and ball milled for 16 hours to obtain a uniform ceramic slurry. The ceramic slurry was cast into a ceramic film with a thickness of 50 µm. Three sheets of 50-micron ceramic membranes are laminated and pressed to obtain laminated and laminated ceramic membranes, and then the laminated and laminated ceramic membranes are cut vertically and horizontally to obtain multiple square ceramic substrate green bodies.

[0059] According to the mass ratio of 100:40:50, zirconia powder, polyvinyl butyral and a mixture of toluene and ethanol with a mass ratio of 1.5:1 were mixed and ball milled for 9 hours to obtain a uniform zirconia slurry. The zirconia slurry was cast to form a zirconia film with a thickness of 30 micrometers. Then cut the zirconia film vertically and horizontally according to the same size as...

Embodiment 2

[0062] According to the mass ratio of 100:30:50, X7R characteristic ceramic powder, polyvinyl butyral and a mixture of toluene and ethanol with a mass ratio of 1.5:1 were mixed and ball milled for 12 hours to obtain a uniform ceramic slurry. The ceramic slurry was cast into a ceramic film with a thickness of 30 µm. Laminate and press eight 30-micron ceramic membranes to obtain laminated and laminated ceramic membranes, and then cut the laminated and laminated ceramic membranes vertically and horizontally to obtain multiple square ceramic substrate green bodies.

[0063] According to the mass ratio of 100:42:47, zirconia powder, polyvinyl butyral and a mixture of toluene and ethanol with a mass ratio of 2:1 were mixed and ball-milled for 10 hours to obtain a uniform zirconia slurry. The zirconia slurry was cast into a zirconia film with a thickness of 40 micrometers. Then cut the zirconia film vertically and horizontally according to the same size as the ceramic substrate gree...

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Abstract

The invention discloses a preparation method of a ceramic substrate. The preparation method comprises the following steps: uniformly mixing ceramic powder, a first organic binder and a first solvent to obtain ceramic slurry, then preparing a ceramic film by using the ceramic slurry as a raw material, and finally preparing a ceramic substrate blank by using the ceramic film as a raw material; uniformly mixing zirconium oxide powder, a second organic binder and a second solvent to obtain zirconium oxide slurry, then preparing a zirconium oxide thin film by using the zirconium oxide slurry as a raw material, and finally cutting the zirconium oxide thin film to obtain a zirconium oxide diaphragm; and sintering the ceramic substrate blank and the zirconium oxide diaphragm alternately laminated on a base plate to obtain the ceramic substrate. According to the preparation method of the ceramic substrate, the ceramic substrate is relatively level and the sintered ceramic substrate can be prevented from being adhered.

Description

technical field [0001] The invention relates to the field of electronic components, in particular to a preparation method of a ceramic substrate. Background technique [0002] Single-layer capacitors have high self-resonant frequency and high quality factor due to their extremely small equivalent series resistance and equivalent series inductance, and the application frequency can reach tens of gigahertz. Due to the ultra-small peripheral size of single-layer capacitors, single-layer capacitors are especially suitable for small and microwave applications, and can be used in microwave integrated circuits to play the role of DC blocking, RF bypass, filtering, and tuning. [0003] The structure of the single-layer capacitor includes a single-layer ceramic dielectric substrate and two electrode layers respectively covering the upper and lower surfaces of the ceramic dielectric substrate. The ceramic substrate used as the medium of the single-layer capacitor is made of ceramic g...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): C04B35/622B32B18/00
Inventor 陆亨宋子峰韦豪任祝忠勇
Owner GUANGDONG FENGHUA ADVANCED TECH HLDG
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