Three-dimensional thermoelectricity energy collector and manufacturing method thereof

The technology of an energy harvester and manufacturing method is applied in the field of three-dimensional thermoelectric energy harvester and its manufacturing, which can solve the problems of low energy collection efficiency, low manufacturing efficiency, and high manufacturing cost, and achieve improved mechanical stability, high Seebeck coefficient, The effect of simplifying the manufacturing process
CN103296190AInactive Publication Date: 2013-09-11SHANGHAI INST OF MICROSYSTEM & INFORMATION TECH CHINESE ACAD OF SCI
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Patent Information

Authority / Receiving Office
CN Β· China
Patent Type
Applications(China)
Current Assignee / Owner
SHANGHAI INST OF MICROSYSTEM & INFORMATION TECH CHINESE ACAD OF SCI
Publication Date
2013-09-11
Estimated Expiration
Not applicable Β· inactive patent

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Abstract

The invention provides a three-dimensional thermoelectricity energy collector and a manufacturing method thereof. A plurality of grooves and silicon columns among the grooves are formed on low-resistance silicon in an etching mode, then an insulation layer is formed on the surfaces of the grooves, a thermoelectricity column is manufactured through a thin film deposition technology, a thermocouple pair is formed by the thermoelectricity column and adjacent silicon columns, a metal arranged wire is manufactured through technologies such as etching deposition, and manufacturing of the three-dimensional thermoelectricity energy collector is completed through technologies such as substrate thinning and substrate supporting in a bonding mode. According to the three-dimensional thermoelectricity energy collector and the manufacturing method thereof, a thermocouple pair structure is manufactured only through the one-time thin film deposition technology, and the manufacturing technology is simplified. Silicon is selected as a component of the thermocouple pair, and the fact that the thermocouple pair has the high Seebeck coefficient is guaranteed. The thermocouple pair of the vertical column-shaped structure is used, mechanical stability of the thermoelectricity energy collector is improved, the thermocouple structure, an upper supporting substrate and a lower supporting substrate are bound by wafer level binding, and accordingly manufacturing efficiency is improved.
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Description

technical field

[0001] The invention belongs to the field of semiconductors, in particular to a three-dimensional thermoelectric energy collector and a manufacturing method thereof. Background technique

[0002] With the development of IoT technology, its application in industrial, commercial, medical, consumer and military fields has gradually deepened, and power supply has always been the key to the life of IoT applications and cost reduction. In harsh environments or other occasions where humans cannot reach or when network nodes move and change, battery replacement becomes very difficult or even impossible, so it is very important to effectively provide energy for IoT nodes. An effective solution is to use the method of energy harvesting to collect environmental energy, store the energy and provide it to the nodes of the Internet of Things. The temperature difference widely exists in the external environment, so energy harvesting using the temperature difference of the ...

Claims

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
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