Polysilicon pretreatment method regulating dropwise addition concentration of nitric acid
A polysilicon and pretreatment technology, applied in the preparation of test samples, etc., can solve the problems of increased liquid amount, loss of boron element, low accuracy of test results, etc., and achieves obvious retention, shortened time, and improved pretreatment efficiency. Effect
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Embodiment 1
[0023] Follow the steps below to detect the impurity content in polysilicon samples:
[0024] (1) Weigh 0.1g of polysilicon sample into a PTFE beaker.
[0025] (2) Add 0.3ml of 1% mannitol solution into the PTFE beaker to infiltrate the polysilicon sample, and make it react with the boron element in the polysilicon sample to keep the boron element as much as possible.
[0026] (3) Add 3.0ml of hydrofluoric acid with a mass fraction of 49% into a PTFE beaker.
[0027] (4) Add 0.5ml of nitric acid with a mass fraction of 35% at a speed of 0.2ml / min, and then add 1.0ml of nitric acid with a mass fraction of 70%.
[0028] A mixed system of hydrofluoric acid and nitric acid is added to react with the polysilicon to make the polysilicon sample change from solid to liquid. In the process of adding nitric acid, first add 0.5ml of nitric acid with a mass fraction of 35%, the reaction rate is slow, so that the reaction heat is less, and more boron is retained; then add 1.0ml of nitric...
Embodiment 2
[0031] Follow the steps below to detect the impurity content in polysilicon samples:
[0032] (1) Weigh 0.5g of polysilicon sample into a PTFE beaker.
[0033] (2) Add 1.0ml of 1% mannitol solution into the PTFE beaker to infiltrate the polysilicon sample, and make it react with the boron element in the polysilicon sample, and keep the boron element as much as possible.
[0034] (3) Add 5.0ml of hydrofluoric acid with a mass fraction of 49% into a PTFE beaker.
[0035] (4) Add 1.0ml of nitric acid with a mass fraction of 35% at a speed of 0.5ml / min, and then add 2.0ml of nitric acid with a mass fraction of 70%, and react until the polysilicon sample is completely dissolved.
[0036] A mixed system of hydrofluoric acid and nitric acid is added to react with the polysilicon to make the polysilicon sample change from solid to liquid. In the process of adding nitric acid, first add 1.0ml of nitric acid with a mass fraction of 35%, the reaction rate is slower, so that the reactio...
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