A kind of production method of polysilicon
A production method and technology of polysilicon, applied in chemical instruments and methods, silicon compounds, inorganic chemistry, etc., can solve the problems of high energy consumption, high cost, complex polysilicon process, etc., achieve fewer processes, save costs, and avoid smelting processes Effect
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Embodiment 1
[0056] Add silicon ore and petroleum coke with 3 times the molar amount of silicon ore into the reactor, heat it to about 1200°C, pass in argon gas and evacuate it for three times, then switch to chlorine gas and pass it into the reactor, and keep the reaction system at a slight temperature during the reaction. Positive pressure state. Examination of the tail gas shows that the tail gas contains a large amount of silicon tetrachloride, other metal chlorides, CO, Cl 2 wait;
[0057] The tail gas undergoes a series of compression and cooling to separate the silicon tetrachloride, the chlorine gas returns to the chlorination reaction, and other non-condensable gases and residues go to the three wastes treatment process.
[0058] At a temperature of 1200°C, H is introduced into silicon tetrachloride 2 , hydrogenate silicon tetrachloride into trichlorosilane, after the hydrogenated tail gas passes through a series of cooling, the hydrogen chloride and chlorosilane in the tail gas...
Embodiment 2
[0062] Add silicon ore and petroleum coke 4 times the molar amount of silicon ore into the reactor, heat it to about 1300°C, pass in argon gas and evacuate it for three times, then switch to chlorine gas and pass it into the reactor. During the reaction, keep the reaction system in micro Positive pressure state. Examination of the tail gas shows that the tail gas contains a large amount of silicon tetrachloride, other metal chlorides, CO, Cl 2 wait;
[0063] The tail gas undergoes a series of compression and cooling to separate the silicon tetrachloride, the chlorine gas returns to the chlorination reaction, and other non-condensable gases and residues go to the three wastes treatment process.
[0064] At a temperature of 550°C, H is introduced into silicon tetrachloride 2 And 1 / 3 times the silicon powder of the mole number of silicon tetrachloride (the reaction formula is 3SiCl 4 +2H 2 +Si=4SiHCl 3 ), hydrogenating silicon tetrachloride into trichlorosilane, after the hy...
Embodiment 3
[0068] Put silicon ore and petroleum coke twice the molar amount of silicon ore into the reactor, heat it to about 900°C, pass in argon gas and evacuate it for three times, then switch to chlorine gas and feed it into the reactor, and keep the reaction system in micro Positive pressure state. Examination of the tail gas shows that the tail gas contains a large amount of silicon tetrachloride, other metal chlorides, CO, Cl 2 wait;
[0069] The tail gas undergoes a series of compression and cooling to separate the silicon tetrachloride, the chlorine gas returns to the chlorination reaction, and other non-condensable gases and residues go to the three wastes treatment process.
[0070] Under the condition that the temperature is 600°C, hydrogen chloride gas and silicon powder with an equimolar number of silicon tetrachloride are introduced into silicon tetrachloride (the reaction formula is SiCl 4 +2HCl+Si=2SiHCl 3 ), hydrogenating silicon tetrachloride into trichlorosilane, a...
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Abstract
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