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Terahertz absorption layer of carbon nano tube and metamaterial composite structure and preparation method of terahertz absorption layer

A technology of carbon nanotubes and composite structures, which is applied in the field of terahertz detection and imaging, can solve the problems of no terahertz imaging, etc., achieve the effects of enhanced absorption rate, simple and reasonable process, and improved terahertz detection performance

Inactive Publication Date: 2014-01-01
成都市金草阳科技有限公司 +1
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Problems solved by technology

But at present, they only use the absorber for experimental measurement of terahertz absorption, and have not actually used it for terahertz imaging research.

Method used

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  • Terahertz absorption layer of carbon nano tube and metamaterial composite structure and preparation method of terahertz absorption layer
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  • Terahertz absorption layer of carbon nano tube and metamaterial composite structure and preparation method of terahertz absorption layer

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Embodiment Construction

[0033] Below in conjunction with accompanying drawing and embodiment the present invention will be further described:

[0034] A terahertz absorbing layer of a composite structure of carbon nanotubes and metamaterials. The terahertz absorbing layer includes, from top to bottom, a top absorbing layer, a medium layer, a metal reflection layer and a carbon nanotube thin film layer. The top absorbing layer is composed of a periodic metal pattern unit of a certain size; the periodic metal pattern unit is composed of a circular metal circle, the thickness of the metal circle is 300nm, the radius is 70um, and the period is 75um. The material used for the top absorbing layer is aluminum. The dielectric layer is made of silicon nitride with a thickness of 2um. The metal reflective layer is made of aluminum with a thickness of 100nm. The thickness of the carbon nanotube film layer is 3.5 microns.

[0035] The terahertz absorbing layer can be prepared on the sensitive unit of the terahe...

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Abstract

The invention discloses a terahertz absorption layer of a carbon nano tube and metamaterial composite structure and a preparation method of the terahertz absorption layer. The terahertz absorption layer sequentially comprises a top absorption layer, a dielectric layer, a metal reflection layer and a carbon nano tube film layer from top to bottom. According to special optical properties of the carbon nano tube film and the absorption rate close to 100 percent of the metamaterial composite structure on terahertz radiation, the absorption rate of a detection unit on terahertz waveband radiation is obviously enhanced, and the terahertz detection performance of a detector is improved. Meanwhile, because the carbon nano tube has high thermal conductivity, the absorbed heat energy can be rapidly transmitted to the detection unit, and the response speed of the detector is improved.

Description

technical field [0001] The invention belongs to the technical field of terahertz detection and imaging, and in particular relates to a terahertz radiation absorbing layer and a preparation method thereof. Background technique [0002] Terahertz detector is one of the key devices in the application of terahertz imaging technology. In the development and application of terahertz detectors, the detection of terahertz signals is of great significance. Because, on the one hand, compared with shorter-wavelength optical band electromagnetic waves, the photon energy of terahertz radiation is low, and background noise usually occupies a prominent position; on the other hand, with the application of terahertz detection technology in various fields, especially military fields, In-depth development, continuous improvement of receiving sensitivity has become an inevitable requirement. Since the thermally sensitive film in the detection unit of the terahertz detector has weak absorption...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): H01L31/0352H01L31/18G01J5/10G01J5/58
CPCG01J1/4257G01J5/12G01J5/58Y02P70/50
Inventor 黎威志丁杰敖天宏孙斌玮樊霖王军
Owner 成都市金草阳科技有限公司
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