Imaging modification method for strengthening performance of piezoelectric film sensor

A technology of piezoelectric film and modification method, which is applied in the direction of analyzing fluids by using acoustic waves/ultrasonic waves/infrasonic waves, etc., which can solve the problems of weakening device sensitivity and specificity, increasing quality, etc., and achieve reduction of non-specific adsorption, reduction of influence, and reduction of space position The effect of resistance

Active Publication Date: 2014-04-02
SUZHOU INST OF BIOMEDICAL ENG & TECH CHINESE ACADEMY OF SCI
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Problems solved by technology

[0004] The purpose of the present invention is to provide a graphical modification method for enhancing the performance of piezoelectric thin film sensors, so as to sol

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  • Imaging modification method for strengthening performance of piezoelectric film sensor
  • Imaging modification method for strengthening performance of piezoelectric film sensor
  • Imaging modification method for strengthening performance of piezoelectric film sensor

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specific Embodiment

[0049] Such as figure 2 shown. Piezoelectric film sensor 1 is composed of the following parts: silicon film structure 2 is etched out by wet method, ground electrode GND3 and piezoelectric film 4 are placed on the back or front of the film, interdigital transducer (Interdigital transducer, IDT) excitation electrode 5 and receiving electrode 6 Between them is the sound wave transverse propagation area. The electrode spacing is d.

[0050] Such as figure 2 shown. A self-assembled monomolecular film layer 7 is fabricated in the acoustic wave propagation area between the excitation electrode 5 and the receiving electrode 6 . Firstly, metal images 8 with a thickness of 5-20 nm are sputtered and uniformly arranged into strip-shaped regions with a line width and spacing of about 200 μm. Preferably, the wavelength λ of the modulated sound wave is in the range of 10-500 μm, and the spacing of the gold strips is d=λ / n.

[0051] Preferably, 2 to 3 kinds of alkanethiol molecules w...

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Abstract

The invention discloses an imaging modification method for strengthening the performance of a piezoelectric film sensor. A simple chemical deposition method is used for carrying out nano-scale thickness self-assembly imaging modification on an acoustic wave propagation crest (trough), so that imaging configuration of biomolecules on the same plane material is achieved on the surface of a sensor, and the capture size of molecules in unit area of a sensitive area of the sensor is improved. Meanwhile, hydrophobization modification is carried out in a non-crest (trough) area to weaken non-specific adsorption of other molecules in a sample, so that molecules are promoted to be configured at the maximal amplitude position of the sensor in a concentrated imaging manner, the mass addition is concentrated in the crest (trough) area, mass addition in unit area is increased, the sensitivity of the piezoelectric film is strengthened, and further the performance of the piezoelectric film sensor is strengthened, the quantitative detection of biological molecules in a complex sample can be realized and a key technology is provided for establishing an high-sensitivity, multi-channel and high-flux automatic biological molecule quantitative detecting method.

Description

technical field [0001] The invention relates to the field of biomolecule detection piezoelectric thin film sensors, in particular to a patterned modification method for enhancing the performance of piezoelectric thin film sensors. Background technique [0002] At present, optical detection methods have been widely used in the detection of trace biomolecules in body fluid environment, but there are still some limitations. For example, when testing samples with complex components and poor light transmission, such as whole blood, it is difficult for optical detection methods to obtain better results. Piezoelectric film sensor is a high-sensitivity mass sensor. Its detection principle is to combine the surface of the film with the molecule to be measured and the film to increase the mass and cause the change of the resonance frequency. The detection performance of complex samples with high viscosity and opacity is better than that of existing optical detection methods. [0003...

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Application Information

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IPC IPC(8): G01N29/036
Inventor 张威周连群吴一辉
Owner SUZHOU INST OF BIOMEDICAL ENG & TECH CHINESE ACADEMY OF SCI
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