Resist stripping agent
A resist stripping agent, high-quality technology, applied in optics, instruments, optical mechanical equipment, etc., can solve the problem of water-soluble organic solvent treatment, damage productivity or workability, etc., and achieve the effect of excellent stripping performance
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no. 1 Embodiment approach ）
[0040] The first embodiment of the present invention contains: (A) 50 to 99 mass % of one or more compounds selected from ethylene carbonate, propylene carbonate, γ-butyrolactone, and cyclopentanone; and (B ) 1 to 50% by mass of glycerol carbonate.
[0041] The compounds used in this embodiment are those in Table 1 below.
[0042] In addition, for example, the normal working environment temperature in a clean room (clean room) of a factory is 22 to 27° C., so “room temperature” in the following description refers to this temperature range.
[0043]
[0044] Both (A) component and (B) component of the resist release agent of this embodiment have a five-membered ring structure in molecular structure. Furthermore, they have a common molecular structure in which one carbon atom constituting the five-membered ring constitutes a carbonyl group. Therefore, compatibility is good and it can mix easily. In addition, it has high solubility in a resist film, especially a resist film...
no. 2 Embodiment approach ）
[0051] The resist stripper of the second embodiment uses ethylene carbonate as the (A) component. In this embodiment, only the component (A) of the first embodiment is ethylene carbonate, and the preferred ratio and more preferable ratio of the component (A) and the component (B) are the same as those of the first embodiment.
[0052] In addition, in this embodiment, when the ethylene carbonate content is 80% by mass or more, ethylene carbonate cannot be completely dissolved and precipitates at normal temperature. Therefore, at this time, it is necessary to heat up to the temperature at which ethylene carbonate dissolves and use it.
no. 4 Embodiment approach ）
[0054] In the third and fourth embodiments, in the first embodiment, ethylene carbonate and propylene carbonate are used as the (A) component in a predetermined ratio.
[0055] In the resist release agent according to this embodiment, the content ratio of ethylene carbonate is 20 to 80% by mass, more preferably 55 to 75% by mass, and the content ratio of propylene carbonate is 5 to 30% by mass, more preferably 5 to 25% by mass. The ratio of the total amount of ethylene carbonate and propylene carbonate as the component (A) to the component (B) is the same as that of the first embodiment.
[0056] When the content of ethylene carbonate is 75% by mass or less, the melting point becomes 15° C. or less, and it becomes liquid at room temperature, thereby improving workability such as ease of metering.
[0057] The preferable ratio of (A) component and (B) component and its reason are the same as the description of 1st Embodiment.
[0058] (Fifth to Eighth Embodiments)
[0059] I...
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Abstract
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