A 5-bit Active Local Oscillator Phase Shifter for X-band
A phase shifter, X-band technology, applied in the direction of phase-shift network, multi-terminal-to-network, etc., can solve the problems of low integration, low phase-shift accuracy, and difficult processing.
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[0042] Take the design of a 5-bit active phase shifter operating at 8GHz~12GHz as an example.
[0043] The structure diagram of the phase shifter is as figure 1 As shown, each sub-circuit is as image 3 , Figure 4 , Figure 5 , Image 6 Shown. Adopt TSMC 0.13μm RF CMOS 1P8M craft, simulation tool is Cadence SpectreRF, adopt 1.2V power supply voltage. Figure 5 The metal used in the transformer balun in the middle is M6. Compared with the high-level metal, M6 has larger parasitic resistance and smaller inter-metal parasitic capacitance, so on the one hand, it can reduce the Q value and increase the bandwidth, on the other hand, it can reduce the differential output. The phase error.
[0044] Image 6 Among them, R18-R25 uses polysilicon resistors, where R18=R19=R20=R21= R22=R23=R24=R25=100Ω. C13-C20 use MIM capacitors, where C13=C14=C15=C16=177fF, C17=C18=C19=C20=145fF. Therefore, the pole of the first stage is , The pole of the second stage is . Considering the gate parasitic...
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